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Hi Ian,
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<div class="">Please reach out to Jeff Hawks… He is helping us to overcome some issues with ours. He also upgrades STS systems.</div>
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<span style="color: rgb(31, 73, 125);" class="">Jeff Hawks<o:p class=""></o:p></span></div>
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<span style="color: rgb(31, 73, 125);" class="">Hawks Technical Services LLC.<o:p class=""></o:p></span></div>
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<span style="color: rgb(31, 73, 125);" class="">2715 Swamp Creek Rd.<o:p class=""></o:p></span></div>
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<span style="color: rgb(31, 73, 125);" class="">Green Lane, PA. 18054<o:p class=""></o:p></span></div>
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<span style="color: rgb(31, 73, 125);" class="">C 215-872-0944<o:p class=""></o:p></span></div>
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<span style="color: rgb(31, 73, 125);" class=""> </span></div>
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Best regards,</div>
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Mark</div>
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________________________________________________________________</div>
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Mark Weiler</div>
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Fab Equipment Manager</div>
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CMU Nanofabrication Facility</div>
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Dept. of Electrical & Computer Engineering</div>
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5000 Forbes Avenue</div>
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Pittsburgh, PA 15213</div>
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P: 412-268-2471</div>
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F: 412-268-4323</div>
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<a href="http://www.ece.cmu.edu" class="">www.ece.cmu.edu</a></div>
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<div class="">On Oct 16, 2017, at 12:10 PM, Ian Harvey <<a href="mailto:IRHarvey@eng.utah.edu" class="">IRHarvey@eng.utah.edu</a>> wrote:</div>
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Dear Labnetwork colleagues,
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<div class="">Every so often we run into a tool problem beyond our ability to repair. In this case, we are wondering if anyone can either recommend a tool repair technician for a 2001-vintage STS ASPECT DRIE or if you have an experienced technician we could
pay to come here and help us bring it back online.</div>
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<div class="">Also, this tool has the anti-footing feature, and we are wondering who in the network has something similar interested in running a (recharge) process for our PI?</div>
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<div class="">Thanks,</div>
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<div class="">—Ian<br class="">
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<div class="">Begin forwarded message:</div>
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<span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">From:
</b></span><span style="font-family: Helvetica; font-size: inherit;" class="">Steve Pritchett <<a href="mailto:spritchett@eng.utah.edu" class="">spritchett@eng.utah.edu</a>><br class="">
</span></div>
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<span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">Subject:
</b></span><span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">STS system and problem statement for lab network</b><br class="">
</span></div>
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<span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">Date:
</b></span><span style="font-family: Helvetica; font-size: inherit;" class="">October 16, 2017 9:57:40 AM MDT<br class="">
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<span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">To:
</b></span><span style="font-family: Helvetica; font-size: inherit;" class="">Ian Harvey <<a href="mailto:IRHarvey@eng.utah.edu" class="">IRHarvey@eng.utah.edu</a>><br class="">
</span></div>
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<span style="font-family: Helvetica; font-size: inherit;" class=""><b class="">Cc:
</b></span><span style="font-family: Helvetica; font-size: inherit;" class="">Charles Fisher <<a href="mailto:charlesjfisher@gmail.com" class="">charlesjfisher@gmail.com</a>><br class="">
</span></div>
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<div class="">Hi Ian,</div>
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<div class="">STS ASPECT ICP etcher (DRIE)</div>
<div class="">Advanced Silicon Etch Cluster Tool (ASPECT), Year of Manufacture: 2001, Serial Number: C102</div>
<div class="">Configured with single chamber and Cluster System with Cassette Automation, Brooks VacuTran 5 robot and Vacuum Cassette Elevator VCE 6 </div>
<div class="">With SOI process kit upgrade.</div>
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<div class="">Problems:</div>
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<li class="">Interlock LED on ICP electronics rack showing "clamp on”. ElectroGrip DR4 ESC control is in clamp off state with 0 volts output to ESC. Results in "clamp fault” just before He LUR test at start of process.</li><li class="">When the dealer PC is reset, the robot is homed. But theta and Z positions appear offset from true home. After a power off/on cycle of the robot and home command from hand control, the robot homes to the true home positions.
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<li class="">Operator station commands to transfer a wafer from cassette to ICP fails, halting the robot endeffector within the VCE and dealer PC shows communication error from VT5.</li></ul>
</li><li class="">Intermittently the VCE stops responding and does not actually re-home or map cassette. An error is not reported but the load station controls are inactive on the operator station window. </li></ul>
<div class="">Thanks,</div>
<div class="">Steve</div>
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