<html><head></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">Dear Labnetwork colleagues,<div><br></div><div>Every so often we run into a tool problem beyond our ability to repair. In this case, we are wondering if anyone can either recommend a tool repair technician for a 2001-vintage STS ASPECT DRIE or if you have an experienced technician we could pay to come here and help us bring it back online.</div><div><br></div><div>Also, this tool has the anti-footing feature, and we are wondering who in the network has something similar interested in running a (recharge) process for our PI?</div><div><br></div><div>Thanks,</div><div><br></div><div>—Ian<br><div><br><div>Begin forwarded message:</div><br class="Apple-interchange-newline"><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>From: </b></span><span style="font-family:'Helvetica'; font-size:medium;">Steve Pritchett <<a href="mailto:spritchett@eng.utah.edu">spritchett@eng.utah.edu</a>><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>Subject: </b></span><span style="font-family:'Helvetica'; font-size:medium;"><b>STS system and problem statement for lab network</b><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>Date: </b></span><span style="font-family:'Helvetica'; font-size:medium;">October 16, 2017 9:57:40 AM MDT<br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>To: </b></span><span style="font-family:'Helvetica'; font-size:medium;">Ian Harvey <<a href="mailto:IRHarvey@eng.utah.edu">IRHarvey@eng.utah.edu</a>><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>Cc: </b></span><span style="font-family:'Helvetica'; font-size:medium;">Charles Fisher <<a href="mailto:charlesjfisher@gmail.com">charlesjfisher@gmail.com</a>><br></span></div><br><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; color: rgb(0, 0, 0); font-size: 14px; font-family: Calibri, sans-serif;"><div>Hi Ian,</div><div><div>STS ASPECT ICP etcher (DRIE)</div><div>Advanced Silicon Etch Cluster Tool (ASPECT), Year of Manufacture: 2001, Serial Number: C102</div><div>Configured with single chamber and Cluster System with Cassette Automation, Brooks VacuTran 5 robot and Vacuum Cassette Elevator VCE 6 </div><div>With SOI process kit upgrade.</div></div><div><br></div><div>Problems:</div><ul><li>Interlock LED on ICP electronics rack showing "clamp on”. ElectroGrip DR4 ESC control is in clamp off state with 0 volts output to ESC. Results in "clamp fault” just before He LUR test at start of process.</li><li>When the dealer PC is reset, the robot is homed. But theta and Z positions appear offset from true home. After a power off/on cycle of the robot and home command from hand control, the robot homes to the true home positions.</li><ul><li>Operator station commands to transfer a wafer from cassette to ICP fails, halting the robot endeffector within the VCE and dealer PC shows communication error from VT5.</li></ul><li>Intermittently the VCE stops responding and does not actually re-home or map cassette. An error is not reported but the load station controls are inactive on the operator station window. </li></ul><div>Thanks,</div><div>Steve</div><div><br></div><div><br></div><div><br></div><div><br></div></div>
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