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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">Dear Vicky,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">EPFL has installed a UNITY Me Plasma Etch System with one DRM chamber and one SCCM chamber for etching SiO2 & Si3N4.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">The DRM chamber is configured for 100mm wafers and the SCCM chamber is configured for 200mm wafers.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">Robot configuration needs to be changed between 100mm wafers and 200mm wafers.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">However 100mm wafers & 150mm wafers can be processed in the 200mm SCCM chamber by using pocket wafers (with the robot in the 200mm wafer configuration).<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">The tool was installed this summer and we are building our experience in this matter right now.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">We will keep you posted.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">With my very best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A">Philippe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A"><o:p> </o:p></span></p>
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<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Dr Philippe Flückiger<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Director of Operations<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><a href="http://cmi.epfl.ch/">http://cmi.epfl.ch/</a><o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Phone +41 21 693 6695</span></i><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#44546A"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Vicky Diadiuk<br>
<b>Sent:</b> lundi 16 octobre 2017 19:58<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] TEL tools<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hi,<o:p></o:p></p>
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<p class="MsoNormal"> Does anybody have Tokyo Electron machines in a shared facility?<o:p></o:p></p>
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<p class="MsoNormal">If so, can they be made to accept wafers & samples smaller than 8” (e.g. by using handle-wafers)?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Any insights would be highly appreciated.<o:p></o:p></p>
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<p class="MsoNormal">Thx,<o:p></o:p></p>
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<p class="MsoNormal"> Vicky <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Dr. Vicky Diadiuk<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Associate Director, Fab Operations<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Microsystems Technology Laboratories<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Massachusetts Institute of Technology<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Room 39-219<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Cambridge, MA 02139<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black">Tel: 617-253-0731<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black"><a href="mailto:diadiuk@mit.edu">diadiuk@mit.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Garamond","serif";color:black"><a href="http://www.mtl.mit.edu">http://www.mtl.mit.edu</a><o:p></o:p></span></p>
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