<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=utf-8"><meta name=Generator content="Microsoft Word 15 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal><a name="_MailEndCompose"><span style='color:#1F497D'>Hi Fouad, <o:p></o:p></span></a></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>This depends on the cleanliness level and applications in your facility. Alkali ions can contaminate and compromise insulating properties of dielectrics. Li is what I would be more worried about. If you have several sputtering systems I would allow LiNbO3 in the less clean one. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Thanks,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Nava<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='color:#1F497D'>Nava Ariel-Sternberg, Ph.D.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Director of CNI Shared Facilities<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Columbia University<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>530 w120th st., NY 10027<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Room 1015/MC 8903<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Office: 212-854-9927<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Cell: 201-562-7600<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Tahoma",sans-serif;color:#1F497D'></span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Fouad Karouta<br><b>Sent:</b> Monday, October 23, 2017 7:33 PM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Sputtering LiNbO3<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span lang=EN-AU>Hi all,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-AU>We had a request to sputter LiNbO3, we don’t have the target yet. <o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU>My question to the network is:<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU>Does sputtering LiNbO3 in a multi users sputter system (where we have more than 50 targets) create any concerns with respect to toxicity (related to Li or Nb) or to cross-contamination?<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-AU>Thank you,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU>Fouad Karouta<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>*************************************<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Manager ANFF ACT Node<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Australian National Fabrication Facility<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Research School of Physics and Engineering<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Australian National University<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>ACT 0200, Canberra, Australia<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Tel: + 61 2 6125 7174<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='mso-fareast-language:EN-AU'>Mob: + 61 451 046 412<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='color:#1F497D;mso-fareast-language:EN-AU'>Email: <a href="mailto:fouad.karouta@anu.edu.au"><span style='color:blue'>fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU style='color:#1F497D;mso-fareast-language:EN-AU'><a href="http://anff-act.anu.edu.au/"><span style='color:blue'>http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-AU><o:p> </o:p></span></p></div></body></html>