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<p class="MsoNormal">Hello Mike,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">My best guess is that the rule is intended to avoid having a silane explosion made worse by compression. We have a blow-out wall in our bunker for that reason.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Vince<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="http://www.cnst.nist.gov/">Center for Nanoscale Science and Technology</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">+1-301-975-2886<o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Michael Hume<br>
<b>Sent:</b> Thursday, December 07, 2017 1:05 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Silane Installation below grade<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hello Colleagues, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We are in the process if installing a new PECVD system which will use 100% SiH4. In reviewing CGA-G13, it states:<o:p></o:p></p>
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<b><span style="font-size:9.5pt">7.2 Indoor storage and use<br>
</span></b><span style="font-size:9.5pt">Buildings, rooms, or areas used for silane storage shall be constructed in accordance with the requirements of the local AHJ. <b>Silane shall not be stored in locations below grade</b> and silane bulk sources shall not
be located indoors. For transfilling exceptions, see Section 18.</span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">In our case, an installation below grade may be preferred. I am wondering if anyone can provide any insight into the reasoning behind this. Does anybody store/use Silane below grade?<o:p></o:p></p>
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<p class="MsoNormal">Thank-you,<o:p></o:p></p>
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<p class="MsoNormal">-Mike.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p style="margin:0cm;margin-bottom:.0001pt"><b><u><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PLEASE NOTE MY PHONE NUMBER HAS CHANGED:</span></u></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
</span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081</span></b><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt"><o:p> </o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Michael Hume</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Operations Manager</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4
</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"><a href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nanofab.ualberta.ca%2F&data=02%7C01%7Cvincent.luciani%40nist.gov%7C3d7e836cd2e14d35e2ba08d53db5f4a8%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636482774072207527&sdata=8NuCYX7MrQc35N5AbjTcr9nOw1xi2Hc5rVoKl2t8gtY%3D&reserved=0" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a>
Ph: </span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081* (New)</span></b><o:p></o:p></p>
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