<div dir="ltr">Hello Colleagues, <div><br></div><div>We are in the process if installing a new PECVD system which will use 100% SiH4. In reviewing CGA-G13, it states:</div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><br><b style="font-size:12.8px">7.2 Indoor storage and use<br></b><span style="font-size:12.8px">Buildings, rooms, or areas used for silane storage shall be constructed in accordance with the requirements of the local AHJ. </span><b style="font-size:12.8px;text-decoration-line:underline">Silane shall not be stored in locations below grade</b><span style="font-size:12.8px"> and silane bulk sources shall not be located indoors. For transfilling exceptions, see Section 18.</span></blockquote><div><br></div><div>In our case, an installation below grade may be preferred. I am wondering if anyone can provide any insight into the reasoning behind this. Does anybody store/use Silane below grade?</div><div><br></div><div>Thank-you,</div><div>-Mike.</div><div> </div><div>-- <br><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><p style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><b><font color="#000000"><u>PLEASE NOTE MY PHONE NUMBER HAS CHANGED:</u> </font><font color="#ff0000">780-953-5081</font></b></span></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><br></span></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Michael Hume</span></p><p style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Operations Manager</span></p><p style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">University of Alberta - nanoFAB</span><br></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="font-size:x-small;line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">        </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">                </span></p><span style="font-size:x-small;font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-size:x-small;font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">      </span><span style="font-family:Arial;font-size:x-small;line-height:13.8px;white-space:pre-wrap"><font color="#000000">Ph: </font><b><font color="#ff0000">780-953-5081* (New)</font></b></span><br></div></div></div></div></div></div></div></div></div></div></div>
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