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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Hi All,<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">I am sorry to hear that someone provided a design that could not work for you, James.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">AGI participated in the Harvard LISE Nanofab design and more recently in the U of Chicago WERC Nanofab and USC MCB Nanofab Designs of the H occupancy cleanrooms
below grade. In general, although these were all covered by different codes, the following allowed them to be constructed with the full approval of the Authorities having jurisdiction. We have had success with this approach on both level and sloped sites.
Duke University FCIEMAS and the UC Berkeley Nanofab use similar techniques due to their unique locations on a sloped site.
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l1 level1 lfo2"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><span style="mso-list:Ignore">1-<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">The HPM (H-2/4 and H-3/4) storage and dispense rooms (gas cabinet and bottle location) were located AT Grade, even though the H-5 occupancy for the Nanofab
is below grade. The gases were piped down to the cleanroom in stainless steel tubing (double wall in the required cases) with gas monitoring, via properly separated shafts with firestopping etc. This worked very well and did not require hazardous gas bottles
such as those for Highly toxic or pyrophoric gases to travel anyplace but a few feet from the loading dock or outdoors, directly to HPM rooms
<b>at grade</b>. These HPM rooms have exposed outside walls (25% of perimeter), doors to outside, explosion venting, explosion proof lighting etc…. Only the tubing with a very small amount of hazardous gas at much lower pressure travels to the Cleanroom and
labs below for use in process tools. <o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l1 level1 lfo2"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><span style="mso-list:Ignore">2-<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Note that there is a calculation in the code to establish exactly where the “grade plane” is, and how much of the floor is “below grade”. Thus , the Harvard
HPM rooms are NOT actually located Below grade according to the calculation at that time. However, a variance was also obtained related to the canopy over the loading dock. .
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l1 level1 lfo2"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><span style="mso-list:Ignore">3-<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Fire department approach and egress of occupants are provided by a large Areaway and stair from the Lower level cleanroom to allow for proper egress from
the H-5 Occupancy below grade. Fire departments have varying ideas of how they would like those areaways and access stairs to be configured, based on their equipment and local codes. It is essential to configure the areaway to meet their needs.
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l1 level1 lfo2"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><span style="mso-list:Ignore">4-<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">In all cases a few conversations with the local fire department, building officials and other authorities having jurisdiction are strongly suggested to
be done early! Often a variance is required, which has not been denied, after a collaborative design, in our experience. Our experience with this continues to the present day all over the USA and abroad. The use of SEMs and EBeam lithography as well as TEMs,
and other vibration sensitive tools to support Nanofabrication efforts in clean or close to clean environments, have pushed nanofabs in urban or otherwise vibration and EMI prone settings, to want the cleanrooms below grade where abatement of disturbances
occurs, and better tool performance is possible. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Best Regards,
<o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">Abbie Gregg</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">President</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">Abbie Gregg, Inc.</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">Phone 480 446-8000 x 107</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">email
</span><a href="mailto:agregg@abbiegregg.com" title="mailto:agregg@abbiegregg.com"><span style="font-size:11.0pt;font-family:"Arial",sans-serif">agregg@abbiegregg.com</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#1F497D">website
</span><a href="http://www.abbiegregg.com" title="http://www.abbiegregg.com/"><span style="font-size:11.0pt;font-family:"Arial",sans-serif">www.abbiegregg.com</span></a><span style="color:#44546A"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:red"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:navy">CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates
and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended
recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately</span></i><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:navy">.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#44546A"><o:p> </o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>James C. Sturm<br>
<b>Sent:</b> Friday, December 8, 2017 6:39 AM<br>
<b>To:</b> Paul, Jack <Jack.Paul@hdrinc.com>; Michael Hume <michael.hume@ualberta.ca>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Silane Installation below grade<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">One other note we ran up against in Princeton about 10-15 years ago: The Harvard lab (built perhaps 15-20 years ago) is below grade, but on one side the ground
was somewhat excavated to let some minimal daylight in, so you might claim it is not below grade. As a result, they were able to either store (maybe) or use (that I’m fairly sure about) silane in the lab. We were designing a new building in a tight
space, with some highly-paid consultants and architects who were supposedly experts on lab design and fire codes. They came up for us with something similar following the Harvard approach. After the design was done (and we had paid them), it turned
out we found out that the national code (IBC, IFC??) that had allowed the Harvard approach had changed (which our “experts” were not at all aware of), so their design (and all the time we sunk into it) was worthless, and we had to start over (with new consultants.)
I don’t recall the exact technical details about H use and B use (are those the right terms?) but that is the gist of the story. )#)$#&*$(#&#$(#*(#&@!!
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">So Beware (and be safe)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Jim Sturm<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">********************************************</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Prof. James C. Sturm</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"> Stephen R. Forrest Professor in Electrical Engineering</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"> Princeton University</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"> B410 E-Quad, Olden St.</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"> Princeton, NJ 08540</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"> 609-258-5610, fax: 609-258-1177</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">
<a href="mailto:sturm@princeton.edu" title="mailto:sturm@princeton.edu">sturm@princeton.edu</a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Paul, Jack<br>
<b>Sent:</b> Thursday, December 07, 2017 8:37 PM<br>
<b>To:</b> Michael Hume <<a href="mailto:michael.hume@ualberta.ca">michael.hume@ualberta.ca</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Silane Installation below grade<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Michael,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The building and fire codes in your jurisdiction (Edmonton) are probably different than the International Building and Fire Codes, but the general approach of
those codes (IBC and IFC) is to restrict hazardous materials in basements because a) it is extremely difficult to fight fires at basement level, and b) basements are harder to exit, and c) typically basements cannot have explosion venting (as John Schott noted
they had at Stanford).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">As a pyrophoric gas, silane deflagrates extremely fast – almost fast enough to be officially labeled an “explosion” and thus when it is stored indoors it is often
required to have an explosion vent (this is the lightly fastened roof structure that John mentioned in his email).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The IBC and IFC restrict the quantity of any pyrophoric material allowable in a single control area (i.e. one floor, or one fire-wall isolated area of a floor)
to maximum of 4 lbs or 50 cu ft in storage, and 10 cu ft in “use-closed system”. As I noted, your jurisdiction in Canada probably has not adopted the IBC and IFC, but my guess is that whatever code applies in your municipality, it will have similar restrictions.
Additionally, it may also refer to CGA G13 (as does the IFC) for design requirements for silane systems, thus adopting CGA-13 by reference.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">In short – you may be violating building and fire code restrictions by placing the silane in the basement level. Your campus architect or fire marshal should
be able to provide guidance, or alternatively a friendly architect or lab planner.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:7.5pt;font-family:"Arial Black",sans-serif;color:#C60C30">Jack Paul,</span><span style="font-size:9.0pt;font-family:"Arial Black",sans-serif;color:#C60C30">
</span><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:#56585A">RA, LEED AP BD+C</span><span style="font-size:9.0pt;font-family:"Arial Black",sans-serif;color:#C60C30"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:#C60C30">D</span></b><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:#56585A"> 602.474.3940
</span><b><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:#C60C30">M</span></b><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:#56585A"> 602.369.2086<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://hdrinc.com/follow-us"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:#595959;text-decoration:none">hdrinc.com/follow-us</span></a><span style="font-size:8.5pt;font-family:"Calibri",sans-serif;color:#595959"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Michael Hume<br>
<b>Sent:</b> Thursday, December 7, 2017 11:05 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Silane Installation below grade<o:p></o:p></span></p>
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<p class="MsoNormal">Hello Colleagues, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We are in the process if installing a new PECVD system which will use 100% SiH4. In reviewing CGA-G13, it states:<o:p></o:p></p>
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<b><span style="font-size:9.5pt">7.2 Indoor storage and use<br>
</span></b><span style="font-size:9.5pt">Buildings, rooms, or areas used for silane storage shall be constructed in accordance with the requirements of the local AHJ. <b>Silane shall not be stored in locations below grade</b> and silane bulk sources shall not
be located indoors. For transfilling exceptions, see Section 18.</span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">In our case, an installation below grade may be preferred. I am wondering if anyone can provide any insight into the reasoning behind this. Does anybody store/use Silane below grade?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thank-you,<o:p></o:p></p>
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<p class="MsoNormal">-Mike.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><b><u><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PLEASE NOTE MY PHONE NUMBER HAS CHANGED:</span></u></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
</span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081</span></b><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt"><o:p> </o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Michael Hume</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Operations Manager</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4
</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.nanofab.ualberta.ca/" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a> Ph:
</span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081* (New)</span></b><o:p></o:p></p>
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