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<font face="Times New Roman, Times, serif">Hi Willyan,<br>
<br>
Sounds like a fun project you've got there!<br>
<br>
So, to steer the discussion a bit, perhaps you could share some
details:<br>
<br>
How much clean space do you have (inside cleanroom, under HEPA
coverage, as opposed to "gray area" or "chase", where pumps go)?<br>
<br>
How much chase area do you have? At Harvard, we have found that
roughly equal is good, and possibly a bit more than 50% chase area
would be nice, too, if you get handy with bulk-head mounting of
equipment (i.e. mounting systems through a hole in the cleanroom
wall, so the back-end of tool is in chase).<br>
<br>
What class room is it? (Class 10, 100, 1000, etc).<br>
<br>
What is your own level of semiconductor experience? Just academic
cleanrooms, worked for Intel/IBM, worked for capital equipment
vendor (Lam/Ulvac/Applied Materials)? This will help folks know
what level of details to go into in their answers.<br>
<br>
What do your professors want to work on? This is usually the
first question we ask when considering new purchases.<br>
<br>
What do you expect the balance to be between academic users and
commercial users (startup companies will often use shared-use
facilities to demonstrate "proof-of-concept", before they get
major funding for their own facilities.)<br>
<br>
From my own experience, I would say: <br>
<br>
Never mind a track system, as they are more aimed at
cassette-loads and full wafers, i.e. industrial users. Ditto wafer
bonder. Ours gets very little use.<br>
<br>
Our maskless aligners seem to be getting very popular.<br>
<br>
Atomic Layer Deposition should be on your list, unless you know
everyone will only be making large devices with micron-scale films
(as opposed to nano-scale films less than 200nm). They are cheap,
easy to maintain, and, at CNS, easily the 3rd or 4th busiest tools
(after evaporators, sputters, and E-Beam lithography, which
probably is not on your list). Very handy, easy to use, just the
ticket!<br>
<br>
Last but not least!: What is your budget? That is usually the
most determining factor, for all of us!<br>
<br>
Do you think you will get continuing/any support from your
institution, or do you have to make your first infusion of money
go a really long way?...<br>
<br>
With a few experienced, saavy engineers, you can make a few $100K
go a long way with used equipment, carefully selected. (Well,
maybe not a <i>long</i> way...)<br>
<br>
And, since our characterization guru just walked in, have you
given thought to characterization equipment, and at least a few
metrology tools? Profilometer, ellipsometer, and a few high
quality microscopes, I should think...<br>
<br>
Let us know about the above parameters, and the ideas will start
flowing, no doubt.<br>
<br>
One approach, if these questions are keeping you up at night, is
to go various academic cleanroom websites (Harvard CNS, Cornell,
Stanford, Berkeley, all the old NNIN and the new NNCI locations)
and look at their tool sets. This will give you some good ideas
for a starting place (similar to the items on your list, but with
vendor/model information).<br>
<br>
<br>
Mac<br>
<br>
</font>
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<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Mac
Hathaway<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Senior
Process and Systems Engineer<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Harvard
Center for <span class="SpellE">Nanoscale</span> Systems<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">11
Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Cambridge,
MA<span style="mso-spacerun:yes"> </span>02138<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">617-495-9012<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;margin-bottom:.0001pt;line-height:
normal"><span style="font-size:12.0pt;font-family:"Times
New Roman","serif""><o:p> </o:p></span></p>
</div>
</div>
<br>
On 12/14/2017 1:30 PM, A. William (Bill) FLOUNDERS wrote:
<blockquote
cite="mid:CAHxjSh=7ghjCEL51rT_+whEp623E8WouiJU7-WKQN6kuQ1gbEw@mail.gmail.com"
type="cite">
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charset=ISO-8859-1">
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<div>
<div>
<div>
<div>
<div>Willyan,<br>
</div>
Congratulations on completion of your cleanroom!<br>
</div>
I recall your initial inquiries in 2012.<br>
</div>
I expect you will receive many labnet responses to your
inquiry.<br>
</div>
When communicating within/through the network, we avoid<br>
</div>
identifying, recommending, or discouraging specific vendors.</div>
<div>However, personal recommendations or advisements are often
<br>
</div>
<div>offered via separate email directly to the poster.</div>
<div><br>
</div>
<div>Network recommendations are more generic and I note Noah
Clay from UPenn <br>
</div>
<div>has already set an excellent tone by encouraging you to
consider a firm for layout <br>
</div>
<div>and install support.</div>
<div><br>
</div>
<div>Similarly, I offer two thoughts:</div>
<div>1. Noah is being too modest - UPenn will host the next UGIM
conference</div>
<div><a moz-do-not-send="true"
href="https://urldefense.proofpoint.com/v2/url?u=https-3A__ugim.nano.upenn.edu_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=QW8JuPwkDjWhjEdOOMT6kEPb94UUkhzYNkGlGwR1RJM&s=bpIOhMIH5iyynRE0yU9fCjHvTdbtu5pC31OpwXbo3KA&e=">https://ugim.nano.upenn.edu/</a></div>
<div>This is an excellent forum for you to hear personal stories
and receive in</div>
<div>person vendor and equipment reviews (good and bad) from
many of us.</div>
<div><br>
</div>
<div>2. I compliment your initial focus on wet benches and
general purpose lithography</div>
<div>equipment. This is the necessary and best place to start.</div>
<div><br>
</div>
<div>I hope to see you in Philadelphia in June 2018.</div>
<div>Bill Flounders</div>
<div>UC Berkeley<br>
</div>
<br>
</div>
<div class="gmail_extra"><br>
<div class="gmail_quote">On Wed, Dec 13, 2017 at 12:54 PM,
Willyan Hasenkamp Carreira <span dir="ltr"><<a
moz-do-not-send="true" href="mailto:HASENKAMP@unisinos.br"
target="_blank">HASENKAMP@unisinos.br</a>></span>
wrote:<br>
<blockquote class="gmail_quote" style="margin:0 0 0
.8ex;border-left:1px #ccc solid;padding-left:1ex">
<div link="#0563C1" vlink="#954F72" lang="PT-BR">
<div class="m_-4980872182717951618WordSection1">
<p class="MsoNormal">Hello Everybody,</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">I´ve recently registered to this
mailing (thanks to Mary Tang from Stanford) and it´s
great.</p>
<p class="MsoNormal">We have recently finished our small
cleanroom, down south in Brazil, and just yesterday we
got the grant for purchasing a few microfabrication
tools.</p>
<p class="MsoNormal">Literaly we have nothing, lab is
empty... but we would like to start doing some
microsystems.
</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">It would be very nice to have your
opinion and references on equipment we could purchase.
</p>
<p class="MsoNormal">Please consider equipment
flexibility, versatility, maintainance cost and
difficulties. Also, students will be allowed to use
them... which can be a burden.</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">I do not know if we are going in a
good direction but we have selected some equipment to
start with:</p>
<p class="MsoNormal">- Laserwriter (which way to go?
Maskless aligner or direct laser write. Any
suggestion? Brand? We know of Heidelberg, but what
about Microwriter ML3 or Picomaster 2000, anyother?
Does anybody have some comments?)</p>
<p class="MsoNormal">- Mask aligner... we will need it
if the choice is to go with direct laser write...
(Here we have suss and evg. Which one would you
prefer?)</p>
<p class="MsoNormal">- Plasma etch – RIE (Any equipment
suggestion? We found Oxford equipment... any other
that could fit?)</p>
<p class="MsoNormal">- Sputtering/PECVD (Does a dual
system for metal and dielectrics make sense? Which
fabricant do you have a good user and maintainance
experience?)</p>
<p class="MsoNormal">- Wetbench... (its hard to find
such things here in Brazil. Do you have any
configuration suggestion that has being working?)</p>
<p class="MsoNormal">- Resist coating and development
(Any suggestion? Suss has some things but are there
other suggestions? I think Brewer also have some
things...)</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">- Other suggestions? Wafer bonding,
RTP, spin track for coat and dev, oven...
</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">It is really basic things, we just
once dreamed to build such small facility 5 years ago
and things are fortunately moving.
</p>
<p class="MsoNormal">Also some disclaimer... We have
never done it, all the people here probably have used
your facilities but it is another level to build and
run one... therefore your honest opion is again
extremelly important. Thank you all for your attention
and I will keep you posted how things move on.</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">Kind regards,</p>
<p class="MsoNormal">Willyan</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">--</span></p>
<p class="MsoNormal"><b><span
style="font-size:10.0pt;color:black">Willyan
Hasenkamp</span></b></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">Universidade do
Vale do Rio dos Sinos - Unisinos</span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">Instituto
Tecnológico de Semicondutores - itt Chip</span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">Escola
Politécnica</span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">Programa de
Pós-Graduação em Engenharia Elétrica</span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black">Av. Unisinos
950, 93022-750, São Leopoldo, RS</span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;color:black"><a
moz-do-not-send="true"
href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.unisinos.br_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=QW8JuPwkDjWhjEdOOMT6kEPb94UUkhzYNkGlGwR1RJM&s=QCcNwCqwxnBsfaD6IzofI-f8YqnqDNpWmBViilVRJFM&e="
target="_blank"><span style="color:#0563c1">www.unisinos.br</span></a>
- Phone: <a moz-do-not-send="true"
href="tel:+55%2051%203591-1122"
value="+555135911122" target="_blank">+55 (51)
3591-1122</a> / Ramal: 3181</span><span
style="font-size:10.0pt"></span></p>
<p class="MsoNormal"> </p>
</div>
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