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<div class="moz-cite-prefix">When you say "jagged edges pictures", I
take that to mean that there is considerable vibration and/or
acoustical noise in the cleanroom. It is foolish to throw away the
SEM's resolution just so it can be inside a cleanroom. Both
viewing resolution and e-beam writing resolution will suffer. I
suggest you put the SEM on a firm basement or bedrock floor. I may
get some flak for saying this, but: you don't need a cleanroom for
e-beam writing, because you are not (presumably) printing
integrated circuits. Low vibration should be a higher priority
than convenience and particle counts. Around here we give the
students the choice of doing the spinning and developing in a
cleanroom, or in a non-clean fume hood. <br>
<div class="moz-signature"> <br>
If the manufacturer passes the site while you can see vibration
in the old SEM, you should find a better manufacturer.<br>
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<font size="-2">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu">nano.yale.edu</a>
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On 12/19/2017 03:04 PM, Palard, Marylene wrote:<br>
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cite="mid:CY1PR06MB2156652639FDA2F2EC294A94FF0F0@CY1PR06MB2156.namprd06.prod.outlook.com"
type="cite">
<pre wrap="">Dear Lab Managers
E-beam photolithography/ SEM experts,
At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.
The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.
Assuming that
- both items are fitting in the room,
- the manufacturer site survey passed,
- we agreed with jagged edges pictures due to cleanroom flow
Could you please share your thoughts on that plan.
Sincerely
Marylene, an avid reader of the labnetwork messages
_______________________________
Marylene Palard, Ph.D.
Program Manager
<a class="moz-txt-link-freetext" href="http://www.mrc.utexas.edu/">http://www.mrc.utexas.edu/</a>
(512) 965 6671
The University of Texas | Microelectronics Research Center
Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445
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