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<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Hi Marylene,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">About the remark of having a high resolution SEM in a clean room I am a strong supporter of having the SEM in a CR environment as for developing new etching processes one need to jump
from an etcher to SEM and vice versa several times. But I admit it is a controversial subject.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Back to your question: We are in the process of designing a new clean room in which we planned a room for an EBL system (Raith 150) and as we are hoping to get funds to get a 100kV
machine we have included the new system with the old one in one room but clean room designers suggested to separate them into two rooms (acoustic from CR filters) so now they are planned in two rooms but the two rooms will be on one concrete stable slab.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Hope this helps,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
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<span style="color:#1F497D">*************************************<o:p></o:p></span></p>
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<span style="color:#1F497D">Manager ANFF ACT Node<o:p></o:p></span></p>
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<span style="color:#1F497D">Australian National Fabrication Facility<o:p></o:p></span></p>
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<span style="color:#1F497D">Research School of Physics and Engineering<o:p></o:p></span></p>
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<span style="color:#1F497D">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
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<span style="color:#1F497D">Australian National University<o:p></o:p></span></p>
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<span style="color:#1F497D">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
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<span style="color:#1F497D">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
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<span style="color:#1F497D">Mob: + 61 451 046 412<o:p></o:p></span></p>
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<span style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a><o:p></o:p></span></p>
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<span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<b><span lang="EN-US" style="color:windowtext">From:</span></b><span lang="EN-US" style="color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Mac Hathaway<br>
<b>Sent:</b> Wednesday, 20 December 2017 8:42 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Two SEM/EBLs set up in the same room : comments<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">Hi Marylene,<br>
<br>
At Harvard CNS, we have two Elionix in the same room, with no ill affects. The columns are maybe 15 ft from each other.<br>
<br>
Congrats on your new tool!<br>
<br>
<br>
Mac<span style="font-size:12.0pt;line-height:115%"><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Mac Hathaway</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Senior Process and Systems Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Harvard Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0cm;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">617-495-9012</span><o:p></o:p></p>
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<span style="font-size:12.0pt;font-family:"Times New Roman , serif",serif"> </span><o:p></o:p></p>
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<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
On 12/19/2017 3:04 PM, Palard, Marylene wrote: <o:p></o:p></span></p>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<pre>Dear Lab Managers <o:p></o:p></pre>
<pre>E-beam photolithography/ SEM experts,<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>Assuming that<o:p></o:p></pre>
<pre>- both items are fitting in the room,<o:p></o:p></pre>
<pre>- the manufacturer site survey passed,<o:p></o:p></pre>
<pre>- we agreed with jagged edges pictures due to cleanroom flow<o:p></o:p></pre>
<pre>Could you please share your thoughts on that plan.<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>Sincerely<o:p></o:p></pre>
<pre>Marylene, an avid reader of the labnetwork messages<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>_______________________________<o:p></o:p></pre>
<pre>Marylene Palard, Ph.D.<o:p></o:p></pre>
<pre>Program Manager<o:p></o:p></pre>
<pre><a href="http://www.mrc.utexas.edu/">http://www.mrc.utexas.edu/</a><o:p></o:p></pre>
<pre>(512) 965 6671<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>The University of Texas | Microelectronics Research Center<o:p></o:p></pre>
<pre>Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445<o:p></o:p></pre>
<pre><o:p> </o:p></pre>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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