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Marylene,
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<div class="">We have also made provision to add a second Ebeam tool or an FIBSEM in the same cleanroom as our current Raith Voyager.</div>
<div class="">I do note that you have already received some useful comments.</div>
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<div class="">I would like to add the following:</div>
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<div class="">(a) If you do plan to add any EM cancellation systems on both tools, please ensure that the two systems do not interact with each other.</div>
<div class="">(b) Have an independent party survey the site including the interference/interraction of the two EM cancellation systems. I had the experience of the tool vendor passing the site surveys or relaxing the specs only for us to accept the tool and
we ended up modifying the site substantially ($$$) to accommodate the existing environmental influences.</div>
<div class="">(c) Our tools are in a cleanroom environment. We do not have any CR filters right above the tool to reduce any acoustic noise vibrations.</div>
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<div class="">All the best with your new tool.</div>
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<div class="">Regards</div>
<div class="">Aju</div>
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<div class="">On Dec 19, 2017, at 2:04 PM, Palard, Marylene <<a href="mailto:marylene@mer.utexas.edu" class="">marylene@mer.utexas.edu</a>> wrote:</div>
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<div class="">Dear Lab Managers <br class="">
E-beam photolithography/ SEM experts,<br class="">
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At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.<br class="">
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The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.<br class="">
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Assuming that<br class="">
- both items are fitting in the room,<br class="">
- the manufacturer site survey passed,<br class="">
- we agreed with jagged edges pictures due to cleanroom flow<br class="">
Could you please share your thoughts on that plan.<br class="">
<br class="">
Sincerely<br class="">
Marylene, an avid reader of the labnetwork messages<br class="">
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_______________________________<br class="">
Marylene Palard, Ph.D.<br class="">
Program Manager<br class="">
<a href="http://www.mrc.utexas.edu/" class="">http://www.mrc.utexas.edu/</a><br class="">
(512) 965 6671<br class="">
<br class="">
The University of Texas | Microelectronics Research Center<br class="">
Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445<br class="">
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labnetwork mailing list<br class="">
labnetwork@mtl.mit.edu<br class="">
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork<br class="">
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<font face="Georgia" class=""><span style="font-size: 11px;" class="">Aju Jugessur, Ph.D.<br class="">
Director, University of Iowa Microfabrication Facility (UIMF)<br class="">
Optical Science and Technology Center<br class="">
Professor Adjunct, Physics and Astronomy<br class="">
University of Iowa<br class="">
Office: IATL 202, Tel: 319-3532342<br class="">
Labs: IATL 170, 172, 174<br class="">
<a href="https://ostc.uiowa.edu/uimf" class="">https://ostc.uiowa.edu/uimf</a></span></font><br class="">
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