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<p>I'd say you're playing with fire:</p>
<p><a class="moz-txt-link-freetext" href="https://www.cdc.gov/niosh/docs/81-123/pdfs/0587.pdf">https://www.cdc.gov/niosh/docs/81-123/pdfs/0587.pdf</a></p>
<p>SbTe certainly qualifies as a heavy metal telluride.</p>
<p>--Mike<br>
</p>
<br>
<div class="moz-cite-prefix">On 2/5/18 11:33 AM, Abelev, Esta wrote:<br>
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<p class="MsoNormal">Dear Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to ask about deposition and
annealing of Ge2Sb2Te5<span style="font-size:12.0pt" lang="EN">.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt" lang="EN">The
sputtering system we use for
</span>Ge2Sb2Te5 deposition is without load lock, the smell
after depositing is horrible but my main concerns is regarding
toxicity. Do you know if those materials/odor toxic?
<o:p></o:p></p>
<p class="MsoNormal">In addition, the group wants to anneal
those samples in RTA at low temp (below 200C) after the
deposition, I am concerns about contaminations? Please
comment.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you, Esta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span
style="font-size:9.0pt;font-family:"Atlanta",serif">-----------------------</span><o:p></o:p></p>
<p class="MsoNormal"><b><span
style="font-size:9.0pt;font-family:"Atlanta",serif">Esta
Abelev, PhD</span></b><o:p></o:p></p>
<p class="MsoNormal"><span
style="font-size:9.0pt;font-family:"Atlanta",serif">Technical
Director,<i> </i>Petersen Institute of NanoScience and
Engineering </span><o:p></o:p></p>
<p class="MsoNormal"><span
style="font-size:9.0pt;font-family:"Atlanta",serif">University
of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA
15261</span><o:p></o:p></p>
<p class="MsoNormal"><span
style="font-size:9.0pt;font-family:"Atlanta",serif">412-383-4096
| <a href="mailto:eabelev@pitt.edu" moz-do-not-send="true"><span
style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a> | <a
href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0"
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<pre class="moz-signature" cols="72">--
Michael P. Young (574) 631-3268 (office)
Nanofabrication Specialist (574) 631-4393 (fax)
Department of Electrical Engineering (765) 637-3784 (cell)
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