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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Hi Michael,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Working with chemicals is a delicate matter and unless you have clear rules about what can be used in shared baths and what cannot. However this
description may still be misinterpreted by users.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">I am not sure if you have users using wet etchants for wafer batches (25x).
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">If users are only using one wafer to smaller pieces at one time you can limit the amount of chemicals used by having adequate containers to use a
limited amount of chemical even with a one 4” wafer (beaker with 11 cm diameter and 5-6 cm edge height). For HF I tend to get regular size containers then get it machined in workshop to reduce the height.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Each user makes his solution and use it then dispose of it upon the rules (neutralize, etc.).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">You may consider the following:<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:Symbol;mso-fareast-language:EN-US"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">To avoid having every user preparing upfront those chemicals and putting a pressure on the storage area, you may consider having one container
of each regularly used solution prepared and topped up by your staff, this can go for RCA, HF dilutions, etc.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:Symbol;mso-fareast-language:EN-US"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">A remark about piranha solution though I suppose the purpose is just cleaning the wafer but H2O2 is unstable in acidic solution and you
should consider how long such a solution can be used. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Email:
<a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://anff-act.anu.edu.au/">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></a></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Michael Khbeis<br>
<b>Sent:</b> Saturday, 10 February 2018 11:19 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Best practices for chemical storage, cross contamination, conservation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Colleagues, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We have many users avoiding shared baths for things like RCA, Piranha, and even developers because they worry about cross-contamination (and rightfully so with random things floating in the baths on a fairly regular basis). However, this
has led to numerous users pouring resealable, food grade containers, that subsequently leave them cluttered on our wet process station work surfaces for up to several weeks. This of course is not an acceptable solution but prohibiting this behavior will result
in a massive waste of otherwise perfectly good chemicals. So we have a challenge of balancing process integrity, safety, and chemical economy. We are looking for better temporary storage solutions that would allow transport of containers to chemical cabinets,
but I am curious how other sites have resolved or administered this issue.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Gratefully,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Dr. Michael Khbeis<br>
Director, Washington Nanofabrication Facility (WNF) <br>
National Nanotechnology Coordinated Infrastructure (NNCI)<br>
University of Washington<br>
Fluke Hall, Box 352143<br>
(O) 206.543.5101<br>
(F) 206.221.1681<br>
(C) 443.254.5192<br>
<a href="mailto:khbeis@uw.edu">khbeis@uw.edu</a><br>
<a href="http://www.wnf.washington.edu/">www.wnf.washington.edu/</a><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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