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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We have our users prepare new RCA and Piranha baths for their applications for their stability varies over time. We tried baths for developers, but it gave us
varying developer times for our clients. So we have dedicated containers for developers and clients user new developer for each process. We also found that it reduced our overall developer usage.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">For HF we have a dedicated BOE bath that gets changed on a periodic basis. If folks need 49% HF then they make use specific what we need. I prefer not to keep
a bath of that sort on hand due to infrequent usage and its danger factor.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Julia Aebersold<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> Sunday, February 11, 2018 5:57 PM<br>
<b>To:</b> Michael Khbeis <khbeis@uw.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Best practices for chemical storage, cross contamination, conservation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Hi Michael,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Working with chemicals is a delicate matter and unless you have clear rules about what can be used in shared baths and what cannot. However this description may
still be misinterpreted by users.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">I am not sure if you have users using wet etchants for wafer batches (25x).
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">If users are only using one wafer to smaller pieces at one time you can limit the amount of chemicals used by having adequate containers to use a limited amount
of chemical even with a one 4” wafer (beaker with 11 cm diameter and 5-6 cm edge height). For HF I tend to get regular size containers then get it machined in workshop to reduce the height.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Each user makes his solution and use it then dispose of it upon the rules (neutralize, etc.).<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">You may consider the following:<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span lang="EN-AU" style="font-size:11.0pt;font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">To avoid having every user preparing upfront those chemicals and putting a pressure on the storage area, you may consider having one container of each
regularly used solution prepared and topped up by your staff, this can go for RCA, HF dilutions, etc.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span lang="EN-AU" style="font-size:11.0pt;font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">A remark about piranha solution though I suppose the purpose is just cleaning the wafer but H2O2 is unstable in acidic solution and you should consider
how long such a solution can be used. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Email:
<a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__anff-2Dact.anu.edu.au_&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=zLOqvn0UFJ0eLaK9rbui7a_VJzTCbEVlsOoxK99xVg0&s=jSavso-Du9v_hBk9HzloCYBQRY6hVTeYiUt7YtCIdCg&e=">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"></a><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Michael Khbeis<br>
<b>Sent:</b> Saturday, 10 February 2018 11:19 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Best practices for chemical storage, cross contamination, conservation<o:p></o:p></span></p>
</div>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Dear Colleagues, <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU">We have many users avoiding shared baths for things like RCA, Piranha, and even developers because they worry about cross-contamination (and rightfully so with random things floating in the baths on a fairly regular basis).
However, this has led to numerous users pouring resealable, food grade containers, that subsequently leave them cluttered on our wet process station work surfaces for up to several weeks. This of course is not an acceptable solution but prohibiting this behavior
will result in a massive waste of otherwise perfectly good chemicals. So we have a challenge of balancing process integrity, safety, and chemical economy. We are looking for better temporary storage solutions that would allow transport of containers to chemical
cabinets, but I am curious how other sites have resolved or administered this issue.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU">Gratefully,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Dr. Michael Khbeis<br>
Director, Washington Nanofabrication Facility (WNF) <br>
National Nanotechnology Coordinated Infrastructure (NNCI)<br>
University of Washington<br>
Fluke Hall, Box 352143<br>
(O) 206.543.5101<br>
(F) 206.221.1681<br>
(C) 443.254.5192<br>
<a href="mailto:khbeis@uw.edu">khbeis@uw.edu</a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.wnf.washington.edu_&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=zLOqvn0UFJ0eLaK9rbui7a_VJzTCbEVlsOoxK99xVg0&s=jlh0oXwODNfDO8TRMbLM7Ig8kkusYr4PlUXgbSNu9Bw&e=">www.wnf.washington.edu/</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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