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Hi all,
<div>Adding to what others mentioned I lie to add:</div>
<div>We use dedicated 4” Si wafers as carrier trays when etching small piers that are fixed with Dow Corning 340 heat sink paste, we ask the users to limit the paste to sample area iso it is not exposed directly to the plasma.</div>
<div>About the He leak it was less than 2 sccm.</div>
<div>If wafer tray or quartz clamp has a chip the He flow may increase so wafer trays should be exempt of chipping. If quartz clamp is damaged it needs replacement.</div>
<div>Note the wafer tray should be a good thermal conductor otherwise sample temperature may go much higher than electrode temperature especially with high ICP / RF powers.</div>
<div>Regards </div>
<div>Fouad Karouta</div>
<div>ANFF ACT Node, Canberra, Australia <br>
<br>
<div id="AppleMailSignature">Sent from my iPhone</div>
<div><br>
On 20 Feb 2018, at 3:43 am, Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>> wrote:<br>
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<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:"Microsoft Sans Serif";
panose-1:2 11 6 4 2 2 2 2 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
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<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal"><span style="color:#1F497D">We emphasize a very clean backside before processing is performed. Also, if processing has been performed prior to etching on the wafer then it can incur deformational stress that just makes it hard to sit on
the chuck without an elevated leak up rate.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We also change the chuck o-rings when the rate starts to climb and perform O2 chamber cleans on a regular basis.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Luciani, Vincent (Fed)<br>
<b>Sent:</b> Friday, February 16, 2018 3:49 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Oxford ICP helium backside cooling performance<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello All,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have 2 Oxford Plasmalab 100 ICP etch tools that are heavily used. 100 mm wafers are the most popular. I am sure I discussed with many of you the trials and tribulations about these tools. My question is about a yur experiences and
lessons learned with regard to keeping the helium leak rate from underneath the wafer under control. I am trying to get a general idea of what is typical and how we are doing compared to that. We have several users that utilize the cryonic etching capability
of our tools so the helium cooling is very important. For those using the tool at -100 C, we find that 8 sccm is too high and users request repair. We generally try to keep the leak rate < 5 sccm at all time but find this difficult to do with the variety
of substrates and etch recipes. We made some progress by ordering specially made quartz discs with a cutout for the wafer flat for better wafer positioning. I am happy to share the dwg if anyone would like it.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">What is your experience? What leak rate do you find tolerable and at what leak rate do you shut the tool down. Any tricks you can share?
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Vince<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.cnst.nist.gov_&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=mdoZzuh-iVfW2dkEtxoD3tB5i278Se94ZmSWmOELTeI&s=EaRs0ZZXBmYM6V4o-hRirTnx1nBy5yHN8foZcdY62h4&e="><span style="color:blue">Center
for Nanoscale Science and Technology</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">+1-301-975-2886<o:p></o:p></span></p>
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