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<p class="MsoNormal">Hi,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are looking to purchase an ALD tool and am now down to the final two possibilities and I was wondering if any of the forum users out there have knowledge/experience (good and bad) of both tools. If you have a film properties you can
share such as roughness, uniformity and particles for materials like SiO2, SiN, Al203 as well that would be very helpful. I’ve already spoken to a few users of both tools so have some idea on them but would now like to broadcast to a wider audience to gather
more information.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tool 1: Picosun R-200 Advanced<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tool 2: Fiji 200 Gen 2<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I hope to hear from you soon.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards, Stuart<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="font-family:"Arial",sans-serif;color:black">Dr. Stuart Pearce
<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Senior Process Engineer/Cleanroom Manager
</span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00B050">I</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"> Ipswich Research Centre<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Tel: +44(0)01473663153 </span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00B050">I</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
E-mail:</span> <span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
<a href="mailto:stuart.pearce@huawei.com"><span style="color:#0563C1">stuart.pearce@huawei.com</span></a></span><span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Company:</span><span lang="DE">
</span><span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Huawei Technologies Research&Development (UK) Limited</span><b><span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00B050">
</span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00B050">I</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"> Address</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#C00000">:</span>
<span lang="DE" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
Phoenix House (B55) Adastral Park, Martlesham Heath, Ipswich, IP5 3RE, UK</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#C00000"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><img border="0" width="52" height="53" id="Picture_x0020_7" src="cid:image001.png@01D3B158.F49FD430" alt="315px-Huawei">
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"><a href="http://www.huawei.com/"><span style="font-family:"Times New Roman",serif;color:black">http://www.huawei.com</span></a></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><img border="0" width="1179" height="34" id="Picture_x0020_2" src="cid:image002.jpg@01D3B158.F49FD430" alt="cid:image002.jpg@01D38A19.FB41DF10"><span style="font-size:10.5pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:12.0pt;mso-line-height-rule:exactly"><span style="font-size:7.0pt;font-family:"Microsoft YaHei",sans-serif;color:black">This e-mail and its attachments contain confidential information from HUAWEI, which is intended only
for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure,reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited.
If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it !<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:12.0pt;mso-line-height-rule:exactly"><span style="font-size:7.0pt;font-family:"Microsoft YaHei",sans-serif;color:black">本邮件及其附件含有华为公司的保密信息，仅限于发送给上面 地址中列出的个人或群组。禁止任何其他人以任何形式使用（包括但不限于全部或部分地泄露、复制、或散发）本邮件中的信息。如果您错收了本邮件，请您立即电话或邮件通知发件人并删除本邮件！</span><span style="font-size:7.0pt;font-family:"Microsoft YaHei",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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