<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
</head>
<body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">
Hi all,
<div class=""><br class="">
</div>
<div class="">I have a user who would like to use the ALD to burn off arsenic materia (2-3 microns) on their Indinium phosphide substrate, at 300 C. Pump the arsenic away and then ALD coat Al203.</div>
<div class="">They do not want any oxidation of their samples after the removal of the arsenic, hence the suggested approach.</div>
<div class=""><br class="">
</div>
<div class="">Can anyone please comment on this? Both from a health/safety and the technical approach. We have an Oxford Opal.</div>
<div class=""><br class="">
</div>
<div class="">Thanks for your feedback.</div>
<div class=""><br class="">
</div>
<div class="">Regards</div>
<div class="">Aju<br class="">
<div><br class="">
<blockquote type="cite" class="">
<div class="">Begin forwarded message:</div>
<br class="Apple-interchange-newline">
<div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;" class="">
<span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif; color:rgba(0, 0, 0, 1.0);" class=""><b class="">From:
</b></span><span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif;" class="">"Zhang, Kailing" <<a href="mailto:kailing-zhang@uiowa.edu" class="">kailing-zhang@uiowa.edu</a>><br class="">
</span></div>
<div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;" class="">
<span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif; color:rgba(0, 0, 0, 1.0);" class=""><b class="">Subject:
</b></span><span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif;" class=""><b class="">questions about ALD</b><br class="">
</span></div>
<div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;" class="">
<span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif; color:rgba(0, 0, 0, 1.0);" class=""><b class="">Date:
</b></span><span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif;" class="">March 13, 2018 at 11:35:51 AM CDT<br class="">
</span></div>
<div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;" class="">
<span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif; color:rgba(0, 0, 0, 1.0);" class=""><b class="">To:
</b></span><span style="font-family: -webkit-system-font, Helvetica Neue, Helvetica, sans-serif;" class="">"Jugessur, Aju S" <<a href="mailto:aju-jugessur@uiowa.edu" class="">aju-jugessur@uiowa.edu</a>><br class="">
</span></div>
<br class="">
<div class="">
<div id="divtagdefaultwrapper" dir="ltr" style="font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; font-size: 12pt; font-family: Calibri, Helvetica, sans-serif;" class="">
<div style="margin-top: 0px; margin-bottom: 0px;" class="">Hi Aju,</div>
<div style="margin-top: 0px; margin-bottom: 0px;" class="">I have a question about 174 ALD system. We have a plan of depositing 2-3um of arsenic on our nanowire samples, then transfer them into ALD, heat them up to ~300C to burn off arsenic and let it get pumped
out(by the pump on ALD), then depositing Al2O3 on nanowires. Please let me know what you think about this plan, if it is feasible. Thanks!</div>
<div style="margin-top: 0px; margin-bottom: 0px;" class=""><span style="font-size: 12pt;" class=""><br class="">
</span></div>
<div style="margin-top: 0px; margin-bottom: 0px;" class=""><span style="font-size: 12pt;" class="">Kailing </span></div>
</div>
</div>
</blockquote>
</div>
<br class="">
<div class="">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">
<div style="letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">
<div style="letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">
<font face="Georgia" class=""><span style="font-size: 11px;" class="">Aju Jugessur, Ph.D.<br class="">
Director, University of Iowa Microfabrication Facility (UIMF)<br class="">
Optical Science and Technology Center<br class="">
Professor Adjunct, Physics and Astronomy<br class="">
University of Iowa<br class="">
Office: IATL 202, Tel: 319-3532342<br class="">
Labs: IATL 170, 172, 174<br class="">
<a href="https://ostc.uiowa.edu/uimf" class="">https://ostc.uiowa.edu/uimf</a></span></font><br class="">
<br class="">
<br class="">
<br class="">
<br class="">
<br class="">
</div>
</div>
</div>
</div>
<br class="">
</div>
</body>
</html>