<div dir="ltr">Hello,<div><br></div><div>It was common to use Ta oxide, that can be made electrochemically. Recipes are in the web. It has the advantage that you can see the size of the crater, so you can determine rates for different size areas. You can see the oxygen (oxide) peak disappear in the profile, and it sputters easily.</div><div><br></div><div>Pilar</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Thu, Mar 29, 2018 at 8:19 AM, Deepalakshmi Putchen Dakshinamoorthy <span dir="ltr"><<a href="mailto:pddeepa@iisc.ac.in" target="_blank">pddeepa@iisc.ac.in</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
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<p style="margin-top:0;margin-bottom:0">Dear all,</p>
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<p style="margin-top:0;margin-bottom:0">We have Ultra Axis XPS and the standard we are using is Ag and Cu.</p>
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<p style="margin-top:0;margin-bottom:0">I would like to know what is the best standard for depth profiling</p>
<p style="margin-top:0;margin-bottom:0">How to check whether the tool is fine at different modes (XPS, UPX, depth profiling, mapping)</p>
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<p style="margin-top:0;margin-bottom:0">Apreciate your valuable inputs</p>
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<div id="m_2406832029857728700divtagdefaultwrapper" dir="ltr" style="font-size:12pt;color:rgb(0,0,0);font-family:Calibri,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols">
<p><span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px">Dr Deepalakshmi PD</span></p>
<p><font face="Arial, sans-serif, serif, EmojiFont"><span style="font-size:12.8px">Technology Manager</span></font></p>
<p><font face="Arial, sans-serif, serif, EmojiFont"><span style="font-size:12.8px">Micro and Nano Characterisation Facility (MNCF)</span></font><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px">Room No. GF-12</span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px">Centre for Nano Science and Engineering (CeNSE)</span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px">Indian Institute of Science (IISc)</span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px">Bengaluru-560 012, INDIA</span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px;background-color:rgb(255,255,255);color:rgb(189,19,152)">T: <a href="tel:+91%2080%202293%203181" value="+918022933181" target="_blank">+91 80 2293 3181</a></span><span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px;background-color:rgb(0,0,255);color:rgb(189,19,152)"><span style="background-color:rgb(255,255,255)"> (Ext:130)</span><span style="background-color:rgb(255,255,255)"></span></span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px;background-color:rgb(255,255,255);color:rgb(189,19,152)">M: +91-9</span><span style="color:rgb(0,111,201);font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px"><span style="background-color:rgb(255,255,255);color:rgb(189,19,152)">886106429</span><a href="tel:+91%2075501%2084746" rel="noopener noreferrer" value="+917550184746" id="m_2406832029857728700LPNoLP" target="_blank"></a></span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<span style="font-family:Arial,sans-serif,serif,EmojiFont;font-size:12.8px"><span style="background-color:rgb(255,255,255);color:rgb(189,19,152)">E:
</span><span style="background-color:rgb(255,255,255);color:rgb(189,19,152)"><a href="mailto:pddeepa@iisc.ac.in" target="_blank">pddeepa@iisc.ac.in</a></span></span><br style="font-family:Arial,sans-serif;font-size:12.8px">
<font style="font-size:16px;font-family:Arial,sans-serif,serif,EmojiFont"><span style="font-size:12.8px"><span style="background-color:rgb(255,255,255);color:rgb(189,19,152)">W: w</span><span style="color:rgb(189,19,152);background-color:rgb(255,255,255)"><a href="http://ww.mncf.cense.iisc.ac.in" target="_blank">ww.mncf.cense.iisc.ac.in</a></span></span></font><br>
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<br></blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><font style="background-color:rgb(255,255,255)"><font face="tahoma, sans-serif" color="#0000ff" size="2">Pilar Herrera-Fierro, Ph.D.<br>LNF User Services Director<br>Lurie Nanofabrication Facility<br>University of Michigan</font><br></font><br>RM 1239 EECS Building<br>1301 Beal Ave.<br>Ann Arbor, MI 48109-2122<br><br><b>Cell</b> 734 646 1399<br><br>(734) 646 1399<div><br></div><div><a href="http://www.lnf.umich.edu" target="_blank">www.lnf.umich.edu</a></div><div><br><br><br></div></div></div></div></div></div></div></div></div></div></div>
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