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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Rich,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> I my experience I would prefer to have a pneumatic bellows sealed or diaphragm style valve controlling O2. You could simply use the 24V to fire a cheap 2
way, self relieving valve to fire the compressed air.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hope this helps<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Richard N. Savage<br>
<b>Sent:</b> Friday, April 13, 2018 4:34 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Oxygen 2-way valve Solenoid<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p><span style="font-family:"Calibri","sans-serif";color:black">Anyone know of a good 2-way valve for use with high purity oxygen that has 24VDC solenoid actuation?<o:p></o:p></span></p>
<p><span style="font-family:"Calibri","sans-serif";color:black">Rich<o:p></o:p></span></p>
<p><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Richard N. Savage, Ph.D.<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Dean of Graduate Education<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Director of Microfab Lab<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Cal Poly State University<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">San Luis Obispo, CA 93407<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">805-756-6519<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Kyle Keenan <<a href="mailto:kckeenan@seas.upenn.edu">kckeenan@seas.upenn.edu</a>><br>
<b>Sent:</b> Friday, April 13, 2018 10:19 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Nanonex NX2600BA mask aligner available</span><span style="font-family:"Calibri","sans-serif";color:black">
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">Hello,<br>
<br>
Our NX2600BA mask aligner module (originally part of our Nanonex <br>
NX2600/2600BA combo system), is no longer needed in our lab, and we are <br>
fielding offers to purchase the unit. Due to a need to create room for <br>
more equipment, and the fact that all of our mask alignment work has <br>
migrated to our Suss aligner, the unit has just been decoupled from the <br>
nanoimprint module, and is available immediately.<br>
<br>
The system is in good working order, and in great condition. It is <br>
currently set up for 4" wafers, but can handle up to 6", and is <br>
outfitted with the backside alignment option (including BS alignment <br>
chuck). Please note that the PC and two side panels are not included <br>
with the aligner. Some of the tool specs include:<br>
<br>
*Newport/Oriel SP97436-1000 flood exposure UV flood exposure unit<br>
*currently set up for 500w arc lamp (365 & 405mn wavelengths)<br>
*4" wafer chucks and pieces chuck<br>
*5x5" mask holder<br>
*better than 1um layer to layer alignment accuracy<br>
*manual drive of x, y, theta<br>
*motorized z drive (WEC) with encoder<br>
*dual front and backside CCD cameras/optics<br>
<br>
If you are interested in purchasing this unit, you can email me directly <br>
with your offer, or if you have any questions. Please note that the <br>
purchaser would be responsible for crating/packaging/shipping/pickup <br>
costs and/or arrangements.<br>
<br>
Thank you,<br>
-- <br>
Kyle Keenan<br>
<br>
Laboratory Manager<br>
Quattrone Nanofabrication Facility<br>
University of Pennsylvania<br>
P: 215-898-7560<br>
F: 215-573-4925<br>
<br>
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