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<p class="MsoNormal"><span style="color:#1F497D">We have the SPTS Microetch HF Vapor System, but it does not use an electrostatic chuck. Wafers sit on top of pins or we have a fixture that holds individual samples.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> Sunday, May 20, 2018 11:00 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] HF Vapour Setup<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-AU">Dear all,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">We have an AMMT HF vapour setup for up to 4 “ wafer size.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but
we never got any feedback/reply from an engineer.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span lang="EN-AU">Also h</span></a><span lang="EN-AU">as anyone good experience with other possible suppliers of HF vapour setup?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Thank you,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">ACT 2601, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D;mso-fareast-language:EN-AU">Email:
<a href="mailto:fouad.karouta@anu.edu.au"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D;mso-fareast-language:EN-AU"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__anff-2Dact.anu.edu.au_&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=xgOoRRBQ1diPXY-isjirGHl99TeklRAJ3HinGcbkJlE&s=1LZEjib_VG5ubjqefOBSPXZCMHk-T7Cf1cJkW1OcT30&e="><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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