<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";
mso-fareast-language:EN-US;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0cm;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";
mso-fareast-language:EN-US;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0cm;
margin-right:0cm;
margin-bottom:0cm;
margin-left:36.0pt;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";
mso-fareast-language:EN-US;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle20
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle21
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle22
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle23
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";
mso-fareast-language:EN-US;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-GB" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal"><span style="color:#1F497D">Idonus has a similar set-up.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">best regards / met vriendelijke groeten,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">Frank Dirne<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">Managing Director Kavli Nanolab</span><span lang="NL" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">Delft University of Technology</span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">Lorentzweg 1, 2628 CJ Delft</span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">TNW (bldg 22) - room D121</span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">Phone: +31 (0)15 27 82357 / +31 614330507</span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">email: </span><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB"><a href="mailto:F.W.A.Dirne@tudelft.nl"><span lang="EN-GB" style="color:purple">F.W.A.Dirne@tudelft.nl</span></a></span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB"> </span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">secretary: +31 (0)15 27 82898</span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB">website: </span><span lang="NL" style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB"><a href="http://www.qn.tudelft.nl/KN"><span lang="EN-GB" style="color:purple">www.qn.tudelft.nl/KN</span></a></span><span style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black;mso-fareast-language:EN-GB"><img border="0" width="202" height="76" id="Picture_x0020_1" src="cid:image001.png@01D3F1AB.E08AC9D0" alt="cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3"></span><span lang="NL" style="color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Fank Dirne<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif";mso-fareast-language:EN-GB">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif";mso-fareast-language:EN-GB"> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> maandag 21 mei 2018 5:00<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] HF Vapour Setup<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-AU">Dear all,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">We have an AMMT HF vapour setup for up to 4 “ wafer size.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but
we never got any feedback/reply from an engineer.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span lang="EN-AU">Also h</span></a><span lang="EN-AU">as anyone good experience with other possible suppliers of HF vapour setup?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Thank you,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">ACT 2601, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="mso-fareast-language:EN-AU">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D;mso-fareast-language:EN-AU">Email:
<a href="mailto:fouad.karouta@anu.edu.au"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D;mso-fareast-language:EN-AU"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
</div>
</body>
</html>