<div dir="ltr">We also have a Vapour HF setup but it does not include an electrostatic chuck, the wafer is simply held in place by a set of drop in pins. </div><div class="gmail_extra"><br><div class="gmail_quote">On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW <span dir="ltr"><<a href="mailto:F.W.A.Dirne@tudelft.nl" target="_blank">F.W.A.Dirne@tudelft.nl</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">





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<p class="MsoNormal"><span style="color:#1f497d">Idonus has a similar set-up.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d">Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black">best regards / met vriendelijke groeten,<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black">Frank Dirne<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="NL" style="font-size:9.0pt;color:black">Managing Director Kavli Nanolab</span><span lang="NL" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">Delft University of Technology</span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">Lorentzweg 1, 2628 CJ Delft</span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">TNW (bldg 22) - room D121</span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">Phone: +31 (0)15 27 82357 / +31 614330507</span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">email: </span><span lang="NL" style="font-size:9.0pt;color:black"><a href="mailto:F.W.A.Dirne@tudelft.nl" target="_blank"><span lang="EN-GB" style="color:purple">F.W.A.Dirne@tudelft.nl</span></a></span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black"> </span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">secretary: +31 (0)15 27 82898</span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">website: </span><span lang="NL" style="font-size:9.0pt;color:black"><a href="http://www.qn.tudelft.nl/KN" target="_blank"><span lang="EN-GB" style="color:purple">www.qn.tudelft.nl/KN</span></a></span><span style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:black"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black"><img border="0" width="202" height="76" id="m_-8134433360828414514Picture_x0020_1" src="cid:image001.png@01D3F1AB.E08AC9D0" alt="cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3"></span><span lang="NL" style="color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d">Fank Dirne<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>
 [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@<wbr>mtl.mit.edu</a>] <b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> maandag 21 mei 2018 5:00<span class=""><br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] HF Vapour Setup<u></u><u></u></span></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span lang="EN-AU">Dear all,<u></u><u></u></span></p><div><div class="h5">
<p class="MsoNormal"><span lang="EN-AU"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">We have an AMMT HF vapour setup for up to 4 “ wafer size.<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but
 we never got any feedback/reply from an engineer.<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.<u></u><u></u></span></p>
<p class="MsoNormal"><a name="m_-8134433360828414514__MailEndCompose"><span lang="EN-AU">Also h</span></a><span lang="EN-AU">as anyone good experience with other possible suppliers of HF vapour setup?<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Thank you,<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Fouad Karouta<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">******************************<wbr>*******<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Manager ANFF ACT Node<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Australian National Fabrication Facility<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Research School of Physics and Engineering<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">L. Huxley Building (#56), Mills Road, Room 4.02<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Australian National University<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">ACT 2601, Canberra, Australia<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Tel: + 61 2 6125 7174<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU">Mob: + 61 451 046 412<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1f497d">Email:
<a href="mailto:fouad.karouta@anu.edu.au" target="_blank"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1f497d"><a href="http://anff-act.anu.edu.au/" target="_blank"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-AU"><u></u> <u></u></span></p>
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