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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Thank you all for your input, it was very helpful!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></a></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Michael Hume [mailto:michael.hume@ualberta.ca]
<br>
<b>Sent:</b> Wednesday, 23 May 2018 7:00 AM<br>
<b>To:</b> Frank Dirne - TNW <F.W.A.Dirne@tudelft.nl><br>
<b>Cc:</b> Fouad Karouta <fouad.karouta@anu.edu.au>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF Vapour Setup<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We also have a Vapour HF setup but it does not include an electrostatic chuck, the wafer is simply held in place by a set of drop in pins. <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW <<a href="mailto:F.W.A.Dirne@tudelft.nl" target="_blank">F.W.A.Dirne@tudelft.nl</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D">Idonus has a similar set-up.</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D">Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days.</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="NL" style="font-size:9.0pt;color:black">best regards / met vriendelijke groeten,</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="NL" style="font-size:9.0pt;color:black">Frank Dirne</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="NL" style="font-size:9.0pt;color:black"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="NL" style="font-size:9.0pt;color:black">Managing Director Kavli Nanolab</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">Delft University of Technology</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">Lorentzweg 1, 2628 CJ Delft</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">TNW (bldg 22) - room D121</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">Phone: +31 (0)15 27 82357 / +31 614330507</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">email: </span><span lang="NL" style="font-size:9.0pt;color:black"><a href="mailto:F.W.A.Dirne@tudelft.nl" target="_blank"><span lang="EN-GB" style="color:purple">F.W.A.Dirne@tudelft.nl</span></a></span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">secretary: +31 (0)15 27 82898</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black">website: </span><span lang="NL" style="font-size:9.0pt;color:black"><a href="http://www.qn.tudelft.nl/KN" target="_blank"><span lang="EN-GB" style="color:purple">www.qn.tudelft.nl/KN</span></a></span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:black"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="font-size:9.0pt;color:black"><img border="0" width="202" height="76" id="m_-8134433360828414514Picture_x0020_1" src="cid:image001.png@01D3F6B1.A094B1A0" alt="cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3"></span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D"> </span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D">Fank Dirne</span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB" style="color:#1F497D"> </span><span lang="EN-GB"><o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> maandag 21 mei 2018 5:00<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] HF Vapour Setup</span><span lang="EN-GB"><o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-GB"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Dear all,<span lang="EN-GB"><o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">We have an AMMT HF vapour setup for up to 4 “ wafer size.<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone
calls talking with an administrator) but we never got any feedback/reply from an engineer.<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><a name="m_-8134433360828414514__MailEndCompose">Also h</a>as anyone good experience with other possible suppliers of HF vapour setup?<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Thank you,<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Fouad Karouta<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">*************************************<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Manager ANFF ACT Node<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Australian National Fabrication Facility<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Research School of Physics and Engineering<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">L. Huxley Building (#56), Mills Road, Room 4.02<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Australian National University<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">ACT 2601, Canberra, Australia<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Tel: + 61 2 6125 7174<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Mob: + 61 451 046 412<span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Email:
<a href="mailto:fouad.karouta@anu.edu.au" target="_blank">fouad.karouta@anu.edu.au</a></span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/" target="_blank">http://anff-act.anu.edu.au/</a></span><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <span lang="EN-GB"><o:p></o:p></span></p>
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_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></p>
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<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:black">-Michael.</span><o:p></o:p></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt"><o:p> </o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><b><u><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PLEASE NOTE MY PHONE NUMBER HAS CHANGED:</span></u></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">
</span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081</span></b><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt"><o:p> </o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Michael Hume</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Operations Manager</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4
</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.nanofab.ualberta.ca/" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a> Ph:
</span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:red">780-953-5081* (New)</span></b><o:p></o:p></p>
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