<div dir="ltr">Iulian,<div><br></div><div>We also have moved to standardized pumps for the vast majority of our tools - a larger Ebara pump and a smaller Adixen pump (mostly for loadlocks), both dry pumps. They were spec'd originally to meet/exceed the needs of our existing equipment and we tested them first to verify better performance and lifetime than our previous pumps. We have several spares and keep an electronic log of the locations for all of them by serial number and track accumulation. We send them directly to the vendor for service (Ebara and Pfeiffer respectively), have had some issues in the past with other 3rd party refurbishment companies. We have a few spare parts like the quick disconnects for the facility water and other odds and ends that are easier to just replace in house, but again, very few. We also do our best to spec new equipment with the same model pumps.</div><div><br></div><div>-Kevin</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Tue, May 29, 2018 at 9:30 AM, DeVito, Richard <span dir="ltr"><<a href="mailto:rdevito@draper.com" target="_blank">rdevito@draper.com</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">Iulian<br>
<br>
While they may not necessarily be the cheapest we have chosen to go with Ebara for all our rough style pumps-dry pumps. This was in a lab wide effort to removal all oil pumps from the fab . Also, they have great added value in that we have a service contract for them to come in periodically and service all the pumps . We get a good deal on rebuilds as well.<br>
These days no one can justify someone full time to service or manage all these pumps so this was a a logical choice for us. We also don't have to stock any spare parts-just a few spare pumps.<br>
<br>
When we spec new tools they must come with a certain model Ebara rough pump that is common to most of the large tools in the fab. In that way if one goes down it's a quick swap out with one of the spares we keep on hand.<br>
<br>
Having said all this, I am not sure if the service here will reflect the service where you are...?<br>
<br>
<br>
Best<br>
<br>
<br>
Rich DeVito<br>
Principle Member Technical Staff<br>
Group Leader Microfabrication Lab<br>
Draper<br>
555 Technology Square,<br>
Cambridge, MA 02139<br>
Phone: 617-258-3819<br>
<a href="http://www.draper.com" rel="noreferrer" target="_blank">www.draper.com</a><br>
<div><div class="h5"><br>
<br>
<br>
-----Original Message-----<br>
From: <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@<wbr>mtl.mit.edu</a>] On Behalf Of Iulian Codreanu<br>
Sent: Friday, May 25, 2018 8:33 AM<br>
To: Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
Subject: [labnetwork] Mechanical pump advice<br>
<br>
Dear Colleagues,<br>
<br>
Over the past four years I have been purchasing equipment for my lab and I did not have the knowledge or the bandwidth to direct the vendors to provide a certain make of mechanical pumps.<br>
<br>
I am working on building a stock of spare parts, pumps, etc and once again I am tapping into your vast knowledge and willingness to help. If you could share your recommendations on mechanical pumps brands, that would be very much appreciated.<br>
<br>
Thank you very much and have a wonderful Memorial Day weekend,<br>
<br>
Iulian<br>
<br>
--<br>
iulian Codreanu, Ph.D.<br>
Director of Operations, UD NanoFab<br>
163 ISE Lab<br>
221 Academy Street<br>
Newark, DE 19716<br>
302-831-2784<br>
<a href="http://udnf.udel.edu" rel="noreferrer" target="_blank">http://udnf.udel.edu</a><br>
<br>
<br>
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</div></div></blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div>Kevin Owen<div>Senior Engineer in Research</div><div>Operations Group, Lurie Nanofabrication Facility</div><div>University of Michigan</div><div>(734) 545-4014</div></div></div></div></div></div>
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