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Hi Aaron,
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<div>Try Quantum Clean, they service many different types of process equipment.</div>
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<div><a href="http://www.quantumclean.com/Service">http://www.quantumclean.com/Service</a></div>
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<div>Best regards,</div>
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<div>Mark<br>
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<div id="AppleMailSignature"><span style="background-color: rgba(255, 255, 255, 0);"><b>Mark Weiler</b><br>
Fab Equipment & Facilities Manager</span>
<div><span style="background-color: rgba(255, 255, 255, 0);">Carnegie Mellon Nanofabrication Facility<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
<a href="x-apple-data-detectors://3/1" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="address" x-apple-data-detectors-result="3/1" style="-webkit-text-decoration-color: rgba(33, 33, 33, 0.258824);">5000 Forbes Ave., Pittsburgh, PA 15213-3890</a><br>
T: <a href="tel:412.268.5430" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="3/2" style="-webkit-text-decoration-color: rgba(33, 33, 33, 0.258824);">412.268.2471</a><br>
F: <a href="tel:412.268.3497" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="3/3" style="-webkit-text-decoration-color: rgba(33, 33, 33, 0.258824);">412.268.3497</a><br>
<a href="http://www.ece.cmu.edu/">www.ece.cmu.edu</a><br>
<a href="http://nanofab.ece.cmu.edu/" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="link" x-apple-data-detectors-result="4">nanofab.ece.cmu.edu</a></span></div>
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On Jun 9, 2018, at 4:02 PM, Aaron Hryciw <<a href="mailto:ahryciw@ualberta.ca">ahryciw@ualberta.ca</a>> wrote:<br>
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<div>Dear colleagues, </div>
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<div>Our open-access facility recently inherited an AJA Orion 5 sputtering system from the lab of a PI who had left the university. While it has a number of nice features that would make it a welcome addition to our toolset (e.g., load locked, substrate heating,
automated deposition control, etc.), it also has a somewhat uncertain history, due to inconsistent and/or missing record keeping in its previous lab. We know for certain that it was used for many magnesium depositions, but there are also rumours of possible
antimony and cadmium (!) depositions, albeit only a handful of times.</div>
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<div>I am looking for advice on how to bring this system to a state where we can safely use and maintain it in the long term. Given its uncertain history and possible toxic contents, we are wary of performing a physical chamber clean ourselves. Are there
service providers available to whom we could send the chamber and deposition hardware (guns, dark space shields, shutters, etc.) to get chemically or physically cleaned? Is it feasible to forego cleaning altogether and just bury everything in a thick Ti layer?</div>
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<div>We have a number of elemental analysis capabilities in house, so we should in the near future be able to have at least semi-quantitative data on what materials are on the chamber walls, but I thought I would poll the Labnetwork for general best practices
on how to proceed. Many thanks in advance.</div>
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<div>Cheers, </div>
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<div> – Aaron</div>
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<p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></p>
<p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br>
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<p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p>
<p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p>
<p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p>
<p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p>
<p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4
</span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph:
780-940-7938</span></p>
<span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">
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