<div dir="ltr"><div>Hello all,</div><div><br></div>Many thanks to everyone for your suggestions. Sounds like a good procedure would be to perform an elemental analysis on the material on the chamber walls, followed by sending the chamber (and all parts therein) out to Quantum Clean if the analysis reveals any toxics.<div><br></div><div>Cheers, </div><div><br></div><div> – Aaron</div><div><br></div></div><div class="gmail_extra"><br clear="all"><div><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><u style="font-size:x-small"> </u><span style="font-size:x-small"> </span><br></div><div><span style="font-size:12.8000001907349px"><font size="1"><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></p><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: 780-940-7938</span></p><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span></font></span><font color="#000000"><br></font><br></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Mon, Jun 11, 2018 at 6:42 AM, John Nash <span dir="ltr"><<a href="mailto:jcn8004@rit.edu" target="_blank">jcn8004@rit.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Aaron,
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Before cleaning it, I would do the elemental analysis. This way you know for sure if it needs to be cleaned or not. Also, it is not just the chamber that will
need to be cleaned but all parts in the process chamber. This includes the chamber isolation valve plates. The majority of the exposed parts in the process chamber and the chamber itself are stainless steel and molybdenum, which should make for easy cleaning.
There are also some feedthroughs to be mindful of in the lid assembly during disassembly and cleaning.
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">I just finished leak checking and repairing a nearly identical AJA system in another lab on our campus. If you would like, I can go re familiarize myself with
it to provide further detail on concerns.<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Regards,
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">John C Nash<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">SMFL - Technician<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Rochester Institute of Technology<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Semiconductor & Microsystems Fabrication Laboratory<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">82 Lomb Memorial Dr.
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><a href="https://maps.google.com/?q=82+Lomb+Memorial+Dr.%0D%0A+%0D%0A+Bldg.+17&entry=gmail&source=g">Bldg. 17</a>-2627<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Rochester, NY 14623<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">585 478-3835 cell<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><a href="mailto:john.nash@rit.edu" target="_blank">john.nash@rit.edu</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><a href="http://www.smfl.rit.edu" target="_blank">www.smfl.rit.edu</a><u></u><u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@<wbr>mtl.mit.edu</a>]
<b>On Behalf Of </b>Aaron Hryciw<br>
<b>Sent:</b> Saturday, June 09, 2018 2:07 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Rehabilitation of sputtering chamber with uncertain history<u></u><u></u></span></p><div><div class="h5">
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<p class="MsoNormal">Dear colleagues, <u></u><u></u></p>
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<p class="MsoNormal">Our open-access facility recently inherited an AJA Orion 5 sputtering system from the lab of a PI who had left the university. While it has a number of nice features that would make it a welcome addition to our toolset (e.g., load locked,
substrate heating, automated deposition control, etc.), it also has a somewhat uncertain history, due to inconsistent and/or missing record keeping in its previous lab. We know for certain that it was used for many magnesium depositions, but there are also
rumours of possible antimony and cadmium (!) depositions, albeit only a handful of times.<u></u><u></u></p>
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<p class="MsoNormal">I am looking for advice on how to bring this system to a state where we can safely use and maintain it in the long term. Given its uncertain history and possible toxic contents, we are wary of performing a physical chamber clean ourselves.
Are there service providers available to whom we could send the chamber and deposition hardware (guns, dark space shields, shutters, etc.) to get chemically or physically cleaned? Is it feasible to forego cleaning altogether and just bury everything in a
thick Ti layer?<u></u><u></u></p>
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<p class="MsoNormal">We have a number of elemental analysis capabilities in house, so we should in the near future be able to have at least semi-quantitative data on what materials are on the chamber walls, but I thought I would poll the Labnetwork for general
best practices on how to proceed. Many thanks in advance.<u></u><u></u></p>
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<p class="MsoNormal">Cheers, <u></u><u></u></p>
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<p class="MsoNormal"> <u></u><u></u></p>
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<p class="MsoNormal"> – Aaron<u></u><u></u></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Aaron Hryciw, PhD, PEng</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Fabrication Group Manager</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 780-940-7938</span><span style="font-size:7.5pt"><u></u><u></u></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.nanofab.ualberta.ca/" target="_blank"><span style="color:#1155cc">www.nanofab.ualberta.ca</span></a>
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