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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Hi All,<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">We are having issues with the Automatic Pressure Control unit (model T3PIA-9603-0) in our ULVAC 550 etcher. The component itself is manufactured by
MKS, and they have serviced it in the past. This is no longer the case. We are looking to identify an alternative vendor for the APC unit or any ideas on a 3<sup>rd</sup> party that might be capable of repairing it. Working directly with ULVAC is an option
we are pursuing, but it is cumbersome, expensive and slow. Any thoughts or perspectives would be greatly appreciated.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);"> <o:p></o:p></span></p>
<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">All the best,<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Adam<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);"><u> </u><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Adam Stieg, Ph.D. <o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Associate Director, California NanoSystems Institute at UCLA<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Director, Integrated Systems Nanofabrication Cleanroom<o:p></o:p></span></p>
<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">Director, Nano and Pico Characterization Laboratory<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">(p) <a href="tel:310.206.2902" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="1">310.206.2902</a><o:p></o:p></span></p>
<p class="MsoNormal" style="margin: 0in 0in 0.0001pt;"><span style="background-color: rgba(255, 255, 255, 0);">(e) <a href="mailto:stieg@cnsi.ucla.edu" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="link" x-apple-data-detectors-result="2">stieg@cnsi.ucla.edu</a><o:p></o:p></span></p>
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