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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">We have both Ga and Fe in our sputter. Ga is in a “bucket” in horizontal position as it can melt and spill.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Marius<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Tim Gilheart<br>
<b>Sent:</b> Wednesday, 11 July 2018 4:19 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Sputtering Galfenol (FeGa alloy)?<o:p></o:p></span></p>
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<p class="MsoNormal">Greetings all,<o:p></o:p></p>
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<p class="MsoNormal">Glad to catch up with a number of you during the recent UGIM conference. <o:p></o:p></p>
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<p class="MsoNormal">I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he’s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his
application. (He’s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that’s useful: <a href="https://aip.scitation.org/doi/10.1063/1.1540130">https://aip.scitation.org/doi/10.1063/1.1540130</a><o:p></o:p></p>
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<p class="MsoNormal">I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject. <o:p></o:p></p>
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<p class="MsoNormal">For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern.<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal"><br>
<span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">-- <br>
Tim Gilheart, Ph.D.<br>
Research Scientist - Nanofabrication Clean Room Manager,<br>
Shared Equipment Authority (SEA), Rice University<br>
Cell: 832-341-5488 | Office: 713-348-3159 | <a href="mailto:gilheart@rice.edu">gilheart@rice.edu</a><br style="orphans: auto;text-align:start;widows: auto;-webkit-text-stroke-width: 0px;word-spacing:0px">
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