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<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D">Hi Nava,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D">We have done a lot of Ru sputtering over the years.<span style="mso-spacerun:yes">
</span>Most of our films are for magnetic applications and tend to be thin, ranging from a few angstroms to a few tens of nanometers.<span style="mso-spacerun:yes">
</span>We have had no issues in these cases.<span style="mso-spacerun:yes"> </span>
In cases where we’ve gone thicker (>100nm), we have had some issues with stress-induced cracking of the films at times, although, we were able to resolve the problem with proper choice of deposition conditions.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D"><br>
Matt<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-fareast-font-family:"Times New Roman";mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D;mso-no-proof:yes">--
<br>
<b>Matthew T. Moneck, Ph.D.</b><br>
Executive Manager, Carnegie Mellon Nanofabrication Facility<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Ave., Pittsburgh, PA 15213-3890<br>
T: 412.268.5430<br>
F: 412.268.3497<br>
<a href="http://www.ece.cmu.edu"><span style="color:blue">www.ece.cmu.edu</span></a><br>
nanofab.ece.cmu.edu<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="mso-fareast-font-family:"Times New Roman"">From:</span></b><span style="mso-fareast-font-family:"Times New Roman""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>DeVito, Richard<br>
<b>Sent:</b> Thursday, July 26, 2018 4:18 PM<br>
<b>To:</b> Nava Ariel-Sternberg <na2661@columbia.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Ru deposition<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Nava,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have e-beam evaporated it for contacts here. There are no toxicity issue I know of..its inert like platinum I believe.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Beware of cracking crucibles on cool down….<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">RD<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rich DeVito<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principle Member Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Draper<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">555 Technology Square,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Cambridge, MA 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Phone: 617-258-3819<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"><a href="http://www.draper.com/">www.draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal" style="mso-outline-level:1"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Thursday, July 26, 2018 2:06 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Ru deposition<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear all, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations?
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Labs<o:p></o:p></p>
<p class="MsoNormal">CEPSR/MC 8903 <o:p></o:p></p>
<p class="MsoNormal">530 west 120<sup>th</sup> st. NY<o:p></o:p></p>
<p class="MsoNormal">NY 10027<o:p></o:p></p>
<p class="MsoNormal">Office: 212-8549927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-5627600<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div class="MsoNormal" align="center" style="text-align:center"><span style="font-size:12.0pt;font-family:"Times New Roman",serif;mso-fareast-font-family:"Times New Roman"">
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If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
<o:p></o:p></span></p>
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