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<p class="MsoNormal"><span style="color:#1F497D">Nava,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have e-beam evaporated it for contacts here. There are no toxicity issue I know of..its inert like platinum I believe.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Beware of cracking crucibles on cool down….<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">RD<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rich DeVito<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principle Member Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Draper<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">555 Technology Square,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Cambridge, MA 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Phone: 617-258-3819<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"><a href="http://www.draper.com/">www.draper.com</a><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Thursday, July 26, 2018 2:06 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Ru deposition<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear all, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations?
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Labs<o:p></o:p></p>
<p class="MsoNormal">CEPSR/MC 8903 <o:p></o:p></p>
<p class="MsoNormal">530 west 120<sup>th</sup> st. NY<o:p></o:p></p>
<p class="MsoNormal">NY 10027<o:p></o:p></p>
<p class="MsoNormal">Office: 212-8549927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-5627600<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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