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<p class="MsoNormal"><span style="color:#1F497D">Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these
systems Represent the best in class for university work.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I can’t think of any cons with either platform.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Harvard University Center for Nanoscale Systems.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Chen, Jun<br>
<b>Sent:</b> Thursday, July 26, 2018 12:51 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Experience on ICP-RIE<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Colleagues,<o:p></o:p></p>
<p class="MsoNormal">We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.
<o:p></o:p></p>
<p class="MsoNormal">Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">best,<br>
<br>
Jun Chen, Ph.D.<br>
Nanofabrication scientist,<br>
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh<br>
3700 O'Hara Street, Pittsburgh, PA 15261<br>
T: 412.383.3282<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nano.pitt.edu_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=rcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA&s=7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM&e=">http://www.nano.pitt.edu/</a><o:p></o:p></p>
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