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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:#1F497D;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
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<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Hi Jun,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">I also have experience with both.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">In general you need to consider the service provided by the companies and this depends much on geographical area. Another general aspect you need to consider: combining the two Cl and
F chemistries in one system may lead to non-reproducibility issues which may be overcome by setting a strict procedure when switching from one chemistry to the other.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">If you need more discussions as Rich mentioned send an email off-line to the person directly.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">ACT 2601, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">
fouad.karouta@anu.edu.au</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></a></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>DeVito, Richard<br>
<b>Sent:</b> Friday, 27 July 2018 6:01 AM<br>
<b>To:</b> Chen, Jun <JUC48@pitt.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Experience on ICP-RIE<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Jun<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">we have systems from both manufacturers including an APEX SLR tool purchased less than 2 years ago<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I can comment on my experience with both…you can call me in the office line to discuss<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">if you want. I am usually available from 8:45-9:30 and again around 12:00 -1:00<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rich DeVito<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Principle Member Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Group Leader Microfabrication Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Draper<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">555 Technology Square,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Cambridge, MA 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Phone: 617-258-3819<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D"><a href="http://www.draper.com/"><span style="color:#0563C1">www.draper.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Chen, Jun<br>
<b>Sent:</b> Thursday, July 26, 2018 12:51 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Experience on ICP-RIE<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Dear Colleagues,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">best,<br>
<br>
Jun Chen, Ph.D.<br>
Nanofabrication scientist,<br>
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh<br>
3700 O'Hara Street, Pittsburgh, PA 15261<br>
T: 412.383.3282<br>
<a href="http://www.nano.pitt.edu/">http://www.nano.pitt.edu/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended
recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
<o:p></o:p></span></p>
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