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<p class="MsoNormal"><span style="color:#1F497D">We are in the process to set up an STS Multiplex system with the Bosch process, too. The installation work has not begun yet, but we did find a former STS engineer who is familiar with these tools. He now has
his own business to work on these tools. His name is Gareth Morgan, contact information below:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Suppliers Name: Gareth Morgan<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Suppliers Company Name: CTP Company Services<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Suppliers Address: 3 Commercial Road<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Cwmfelinfach<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Nr Newport<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Gwent<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Email Address: garethmorganctp@outlook.com<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Helvetica-Bold",sans-serif">Mobile Number: 44 07754002875</span></b><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Larry A Rehn<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Technical Lab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">AggieFab Nanofabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Texas A&M University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">979 845-3199<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:lrehn@tamu.edu"><span style="color:#0563C1">lrehn@tamu.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><img border="0" width="300" height="73" id="Picture_x0020_2" src="cid:image001.jpg@01D428B2.892AF2D0" alt="cid:image001.jpg@01CEC37D.FAF8C9E0"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>proma016@fiu.edu<br>
<b>Sent:</b> Friday, July 27, 2018 4:31 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] STS Multiplex DRIE<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greetings labnetwork<span style="font-size:12.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?<o:p></o:p></p>
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<p class="MsoNormal">Sent from my iPhone<o:p></o:p></p>
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On Jul 26, 2018, at 10:06 PM, Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D">Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these
systems Represent the best in class for university work.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">I can’t think of any cons with either platform.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Steve Paolini</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Equipment Dood</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Harvard University Center for Nanoscale Systems.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Steve Paolini</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Principal Equipment Engineer</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Harvard University Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">617- 496- 9816</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.cns.fas.harvard.edu&d=DwMFaQ&c=ODFT-G5SujMiGrKuoJJjVg&r=viXbs6wGaGZ-o2y0LFbqZrWN_jy4Cw47zl8d3Wrr2M4&m=OooMf9HWMMkrW0wkfk2bHwcBRxt7_v7ZTDmXmjwLBnU&s=Rg9bmZ7UNNQxokzbYkqncxuXkLiWyTK2LisL6oiWRmE&e=">www.cns.fas.harvard.edu</a></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Chen, Jun<br>
<b>Sent:</b> Thursday, July 26, 2018 12:51 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Experience on ICP-RIE</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Dear Colleagues,<o:p></o:p></p>
<p class="MsoNormal">We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.
<o:p></o:p></p>
<p class="MsoNormal">Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">best,<br>
<br>
Jun Chen, Ph.D.<br>
Nanofabrication scientist,<br>
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh<br>
3700 O'Hara Street, Pittsburgh, PA 15261<br>
T: 412.383.3282<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nano.pitt.edu_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=rcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA&s=7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM&e=">http://www.nano.pitt.edu/</a><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">_______________________________________________<br>
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