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<p class="MsoNormal">We’ve had good luck with Jeff Hawks for our STS ASE DRIE.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Jeff Hawks<o:p></o:p></p>
<p class="MsoNormal">Hawks Technical Services LLC.<o:p></o:p></p>
<p class="MsoNormal">2715 Swamp Creek Rd.<o:p></o:p></p>
<p class="MsoNormal">Green Lane, PA. 18054<o:p></o:p></p>
<p class="MsoNormal">C 215-872-0944<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Cheers,<o:p></o:p></p>
<p class="MsoNormal">John<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">John P. Nibarger, Ph.D.<br>
Manager, Boulder Micro-fabrication Facility<br>
Microfabrication Group Leader (687.10)<br>
National Institute of Standards and Technology<br>
<a href="https://na01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaps.google.com%2F%3Fq%3D325%2BBroadway%26entry%3Dgmail%26source%3Dg&data=02%7C01%7Cjohn.nibarger%40nist.gov%7C7a4a44cd6aa74b8b87dd08d5295f3175%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636460411211981162&sdata=QzQI8AT3AFr2jBLhHQHeeTUvIHeXtnrZJ83CM453uEA%3D&reserved=0"><span style="color:#0563C1">325
Broadway</span></a>, MS 817.03<br>
Boulder, CO 80305<br>
<u><a href="tel:(303)%20497-4575" target="_blank"><span style="color:#0563C1">303-497-4575</span></a></u> (phone)<br>
<u><a href="tel:(303)%20497-3042" target="_blank"><span style="color:#0563C1">303-497-3042</span></a></u> (fax)<br>
<u><a href="mailto:john.nibarger@nist.gov" target="_blank"><span style="color:#0563C1">john.nibarger@nist.gov</span></a></u><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;color:black">From: </span></b><span style="font-size:12.0pt;color:black"><labnetwork-bounces@mtl.mit.edu> on behalf of "proma016@fiu.edu" <proma016@fiu.edu><br>
<b>Date: </b>Friday, July 27, 2018 at 6:59 AM<br>
<b>To: </b>"labnetwork@mtl.mit.edu" <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>[labnetwork] STS Multiplex DRIE<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Greetings labnetwork <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?<o:p></o:p></p>
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<p class="MsoNormal">Sent from my iPhone<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><br>
On Jul 26, 2018, at 10:06 PM, Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D">Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these
systems Represent the best in class for university work.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">I can’t think of any cons with either platform.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Steve Paolini</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Equipment Dood</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Harvard University Center for Nanoscale Systems.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Steve Paolini</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Principal Equipment Engineer</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Harvard University Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">617- 496- 9816</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.cns.fas.harvard.edu&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cad565b164c934851ffba08d5f3c0c0f0%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636682931559003003&sdata=o%2F2Mt1rghHI5FfJvigHLup8LUq%2BZJWWrLCCVD0xmDMQ%3D&reserved=0">www.cns.fas.harvard.edu</a></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Chen, Jun<br>
<b>Sent:</b> Thursday, July 26, 2018 12:51 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Experience on ICP-RIE</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Dear Colleagues,<o:p></o:p></p>
<p class="MsoNormal">We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.
<o:p></o:p></p>
<p class="MsoNormal">Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">best,<br>
<br>
Jun Chen, Ph.D.<br>
Nanofabrication scientist,<br>
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh<br>
3700 O'Hara Street, Pittsburgh, PA 15261<br>
T: 412.383.3282<br>
<a href="https://na01.safelinks.protection.outlook.com/?url=https%3A%2F%2Furldefense.proofpoint.com%2Fv2%2Furl%3Fu%3Dhttp-3A__www.nano.pitt.edu_%26d%3DDwMF-g%26c%3DWO-RGvefibhHBZq3fL85hQ%26r%3D-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks%26m%3DrcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA%26s%3D7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM%26e%3D&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cad565b164c934851ffba08d5f3c0c0f0%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636682931559003003&sdata=9%2FzdhXW%2BlWh4O1Wbb728JwyHJxj6pQeaPj0C020YuqY%3D&reserved=0">http://www.nano.pitt.edu/</a><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">_______________________________________________<br>
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