<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"><!-- P {margin-top:0;margin-bottom:0;} --></style>
</head>
<body dir="ltr">
<div id="divtagdefaultwrapper" style="font-size:12pt;color:#000000;font-family:Calibri,Helvetica,sans-serif;" dir="ltr">
<p style="margin-top:0;margin-bottom:0">Hello Seong Jin,</p>
<p style="margin-top:0;margin-bottom:0"><br>
</p>
<p style="margin-top:0;margin-bottom:0">Well - there are a lot of ways you can do this. If you don't care about critical dimensions, for example we have our students create an "Art Wafer" - basically they get an image, or drawing an image and print onto a
transparency film to the size of the clear mask glass plate. We have them transfer to a 4 or 6in wafer with about 5k SiO2, pattern, etch in BOE 6:1 for 8min, strip the resist and they get a copy of the mask. Varying the SiO2 thickness gives them different
colors.</p>
<p style="margin-top:0;margin-bottom:0"><br>
</p>
<p style="margin-top:0;margin-bottom:0">If you need more precision, you can find a high end print shop that produce high contrast lithographs on plastic film - I used one a long time ago at a cost of less than $20each. The minimum resolution is on the order
of 5um or so. </p>
<p style="margin-top:0;margin-bottom:0"><br>
</p>
<p style="margin-top:0;margin-bottom:0">Of course if you need more precision, you can get a chrome/glass plate made - about $500 or so.</p>
<p style="margin-top:0;margin-bottom:0"><br>
</p>
<p style="margin-top:0;margin-bottom:0">What is the minimum resolution you need?</p>
<p style="margin-top:0;margin-bottom:0"><br>
</p>
<div id="Signature">
<div id="divtagdefaultwrapper" dir="ltr" style="font-size:12pt; color:rgb(0,0,0); background-color:rgb(255,255,255); font-family:Calibri,Arial,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols">
<div name="divtagdefaultwrapper" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:; margin:0">
Kind Regards,
<div><br>
</div>
<div>Matthias Pleil, Ph.D.</div>
<div>Research Professor & Lecturer III of Mech. Eng - UNM</div>
<div>UNM MTTC Cleanroom Manager</div>
<div>PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education</div>
<div>scme-nm.org, scme-support.org</div>
<div>(505)272-7157</div>
</div>
</div>
</div>
</div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Seong Jin Jang <jjang@udel.edu><br>
<b>Sent:</b> Tuesday, August 7, 2018 2:36:55 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Photo lithography mask using transparency film</font>
<div> </div>
</div>
<meta content="text/html; charset=utf-8">
<div>
<div dir="ltr">Dear all,
<div><br>
</div>
<div>I am trying to make the photo lithography mask using transparency film.</div>
<div>If you tried that before, can you share your experience?</div>
<div><br>
</div>
<div>For example,</div>
<div>Maximum resolution you reach</div>
<div>Printer model and specification you use</div>
<div>Film specification you use</div>
<div>Vendors who can make the mask</div>
<div>And, more!</div>
<div><br>
</div>
<div>I appreciate your help.</div>
<div><br>
</div>
<div>From Seong</div>
<div><br clear="all">
<div><br>
</div>
-- <br>
<div dir="ltr" class="x_gmail_signature">
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div>Seong Jin Jang</div>
<div>Nanofabrication Teaching Laboratory </div>
<div>Facility Specialist<br>
</div>
<div><span style="text-align:left; color:rgb(34,34,34); text-transform:none; line-height:normal; text-indent:0px; letter-spacing:normal; font-family:arial,sans-serif; font-size:13.33px; font-variant:normal; word-spacing:0px; white-space:normal; float:none; background-color:transparent; display:inline"><span style="float:none; background-color:transparent; color:rgb(34,34,34); font:400 13.33px arial,sans-serif; letter-spacing:normal; text-align:left; text-decoration:none; text-indent:0px; text-transform:none; white-space:normal; word-spacing:0px; display:inline">302-831-3900</span></span></div>
<div><span style="float:none; background-color:transparent; color:rgb(34,34,34); font:400 13.33px arial,sans-serif; letter-spacing:normal; text-align:left; text-decoration:none; text-indent:0px; text-transform:none; white-space:normal; word-spacing:0px; display:inline">310
DuPont Hall</span></div>
<div><span style="float:none; background-color:transparent; color:rgb(34,34,34); font:400 13.33px arial,sans-serif; letter-spacing:normal; text-align:left; text-decoration:none; text-indent:0px; text-transform:none; white-space:normal; word-spacing:0px; display:inline">University
of Delaware</span></div>
<div><font size="2"><br>
</font></div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</body>
</html>