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Jeff Hawks has been very helpful for us here at CMU. He provides PLC-based upgrades to STS/STPS systems, and has upgraded our AOE system (previously on a cluster tool) to have its own load lock with new MMI.
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<div class="">See John’s email for contact info…</div>
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<div class="">Mark<br class="">
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Mark Weiler</div>
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Equipment & Facilites Manager</div>
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CMU Nanofabrication Facility</div>
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Dept. of Electrical & Computer Engineering</div>
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5000 Forbes Avenue</div>
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Pittsburgh, PA 15213</div>
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P: 412-268-2471</div>
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F: 412-268-4323</div>
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<a href="http://www.ece.cmu.edu" class="">www.ece.cmu.edu</a></div>
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<div class="">On Jul 31, 2018, at 9:27 PM, Nibarger, John (Fed) <<a href="mailto:john.nibarger@nist.gov" class="">john.nibarger@nist.gov</a>> wrote:</div>
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We’ve had good luck with Jeff Hawks for our STS ASE DRIE.<o:p class=""></o:p></div>
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<o:p class=""> </o:p></div>
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Jeff Hawks<o:p class=""></o:p></div>
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Hawks Technical Services LLC.<o:p class=""></o:p></div>
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2715 Swamp Creek Rd.<o:p class=""></o:p></div>
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Green Lane, PA. 18054<o:p class=""></o:p></div>
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C 215-872-0944<o:p class=""></o:p></div>
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<o:p class=""> </o:p></div>
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Cheers,<o:p class=""></o:p></div>
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John<o:p class=""></o:p></div>
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<o:p class=""> </o:p></div>
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John P. Nibarger, Ph.D.<br class="">
Manager, Boulder Micro-fabrication Facility<br class="">
Microfabrication Group Leader (687.10)<br class="">
National Institute of Standards and Technology<br class="">
<a href="https://na01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaps.google.com%2F%3Fq%3D325%2BBroadway%26entry%3Dgmail%26source%3Dg&data=02%7C01%7Cjohn.nibarger%40nist.gov%7C7a4a44cd6aa74b8b87dd08d5295f3175%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636460411211981162&sdata=QzQI8AT3AFr2jBLhHQHeeTUvIHeXtnrZJ83CM453uEA%3D&reserved=0" style="color: rgb(149, 79, 114); text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">325
Broadway</span></a>, MS 817.03<br class="">
Boulder, CO 80305<br class="">
<u class=""><a href="tel:(303)%20497-4575" target="_blank" style="color: rgb(149, 79, 114); text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">303-497-4575</span></a></u> (phone)<br class="">
<u class=""><a href="tel:(303)%20497-3042" target="_blank" style="color: rgb(149, 79, 114); text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">303-497-3042</span></a></u> (fax)<br class="">
<u class=""><a href="mailto:john.nibarger@nist.gov" target="_blank" style="color: rgb(149, 79, 114); text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">john.nibarger@nist.gov</span></a></u><o:p class=""></o:p></div>
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<b class=""><span style="font-size: 12pt;" class="">From:<span class="Apple-converted-space"> </span></span></b><span style="font-size: 12pt;" class=""><<a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a>> on behalf of
"<a href="mailto:proma016@fiu.edu" class="">proma016@fiu.edu</a>" <<a href="mailto:proma016@fiu.edu" class="">proma016@fiu.edu</a>><br class="">
<b class="">Date:<span class="Apple-converted-space"> </span></b>Friday, July 27, 2018 at 6:59 AM<br class="">
<b class="">To:<span class="Apple-converted-space"> </span></b>"<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>><br class="">
<b class="">Subject:<span class="Apple-converted-space"> </span></b>[labnetwork] STS Multiplex DRIE<o:p class=""></o:p></span></div>
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Greetings labnetwork<span class="Apple-converted-space"> </span><o:p class=""></o:p></div>
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Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?<o:p class=""></o:p></p>
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Sent from my iPhone<o:p class=""></o:p></div>
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On Jul 26, 2018, at 10:06 PM, Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">spaolini@cns.fas.harvard.edu</a>> wrote:<o:p class=""></o:p></p>
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<span style="color: rgb(31, 73, 125);" class="">Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these
systems Represent the best in class for university work.</span><o:p class=""></o:p></div>
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<span style="color: rgb(31, 73, 125);" class="">I can’t think of any cons with either platform.</span><o:p class=""></o:p></div>
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<span style="color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div>
<div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class="">
<span style="color: rgb(31, 73, 125);" class="">Steve Paolini</span><o:p class=""></o:p></div>
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<span style="color: rgb(31, 73, 125);" class="">Equipment Dood</span><o:p class=""></o:p></div>
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<span style="color: rgb(31, 73, 125);" class="">Harvard University Center for Nanoscale Systems.</span><o:p class=""></o:p></div>
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<span style="color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div>
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<div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class="">
<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">Steve Paolini</span><o:p class=""></o:p></div>
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<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">Principal Equipment Engineer</span><o:p class=""></o:p></div>
<div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class="">
<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">Harvard University Center for Nanoscale Systems</span><o:p class=""></o:p></div>
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<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">11 Oxford St.</span><o:p class=""></o:p></div>
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<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">Cambridge, MA 02138</span><o:p class=""></o:p></div>
<div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class="">
<span style="font-size: 14pt; color: rgb(31, 73, 125);" class="">617- 496- 9816</span><o:p class=""></o:p></div>
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<span style="font-size: 14pt; color: rgb(31, 73, 125);" class=""><a href="mailto:spaolini@cns.fas.harvard.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">spaolini@cns.fas.harvard.edu</a></span><o:p class=""></o:p></div>
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<span style="font-size: 14pt; color: rgb(31, 73, 125);" class=""><a href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.cns.fas.harvard.edu&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cad565b164c934851ffba08d5f3c0c0f0%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636682931559003003&sdata=o%2F2Mt1rghHI5FfJvigHLup8LUq%2BZJWWrLCCVD0xmDMQ%3D&reserved=0" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">www.cns.fas.harvard.edu</a></span><o:p class=""></o:p></div>
</div>
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<span style="color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div>
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<b class=""><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class="">From:</span></b><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class=""><span class="Apple-converted-space"> </span><a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">labnetwork-bounces@mtl.mit.edu</a><span class="Apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">mailto:labnetwork-bounces@mtl.mit.edu</a>]<span class="Apple-converted-space"> </span><b class="">On
Behalf Of<span class="Apple-converted-space"> </span></b>Chen, Jun<br class="">
<b class="">Sent:</b><span class="Apple-converted-space"> </span>Thursday, July 26, 2018 12:51 PM<br class="">
<b class="">To:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">labnetwork@mtl.mit.edu</a><br class="">
<b class="">Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] Experience on ICP-RIE</span><o:p class=""></o:p></div>
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Dear Colleagues,<o:p class=""></o:p></div>
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We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.<o:p class=""></o:p></div>
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Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!<o:p class=""></o:p></div>
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best,<br class="">
<br class="">
Jun Chen, Ph.D.<br class="">
Nanofabrication scientist,<br class="">
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh<br class="">
3700 O'Hara Street, Pittsburgh, PA 15261<br class="">
T: 412.383.3282<br class="">
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