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<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have a Cee 200X spin coater, equipped with throttle valve and N2 diffusers, and are having hard time getting good uniformity on wafers. The best we can get is about 3% for a 3” wafer.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have removed the dispenser plastic piece and have sealed the hole with tape at the bottom and the uniformity has dropped to 0.6% but it is not repeatable as the tape is not stiff enough and has some wrinkles. We suspect that the dispenser
plastic piece (and the N2 diffusers?) creates air turbulence inside the spinner bowl and we plan to make a flat lid with no hole at the center.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We would to know if other owners of this spin coater have experienced similar issues. Any feedback will be appreciated.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="font-family:"Lucida Calligraphy";mso-fareast-language:EN-CA">Lino Eugene, P.Eng., Ph.D.,<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA">Micro/nanofabrication process engineer</span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA">Quantum NanoFab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">N2L 3G1</span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA">Cell: +1 226-929-1685</span><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Website:<span style="color:black">
<a href="https://fab.qnc.uwaterloo.ca/"><span style="color:#0563C1">https://fab.qnc.uwaterloo.ca/</span></a></span></span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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