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<p class="MsoNormal"><span style="color:#1F497D">At Harvard <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">The PPE requirements for developers that have between 2.5 and 3% Tetramethyl ammonium hydroxide in them:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">While pouring from gallon containers into beakers: safety glasses, face shield, disposable chemical apron, one 6 mil pair of nitrile and then over that glove is a longer sleeve type blue nitrile glove (4 mil)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">When working with smaller quantities (100 ml beakers and less) we lessen PPE to safety glasses but still double glove (two thin gloves) no apron required.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">The latest death related to TMAH was in Korea and it was with 8.75% TMAH (used as a pallet cleaning detergent so this person had his entire legs covered with 8.75% TMAH he died 5 hours later from acute TMAH poisoning)
so this material warrants extra precaution.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="color:windowtext">From:</span></b><span style="color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Beaudoin, Mario<br>
<b>Sent:</b> Monday, October 29, 2018 8:23 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Handling of MF-319 Developer<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p>This is also how we do it at our facility. Safety glasses and nitrile glove (we're phasing out latex gloves but we're still using up our inventory) in the laminar flow vented wetbench (Microzone/DFMZ). No extra PPE.<span style="font-size:12.0pt"><o:p></o:p></span></p>
<p>Mario<o:p></o:p></p>
<p><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On 2018-10-29 2:34 PM, Aebersold,Julia W. wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D">At our facility we primarily use MF-319 developer in puddle processing for most of photolithography processes for we do not have a track system.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">I am reviewing our PPE for use with this material. Currently, all clients wear safety glasses and nitrile gloves at our well ventilated developer bench. I am curious to know if additional PPE is utilized by
other facilities and or butyl gloves.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__louisville.edu_micronano_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=cRmvgfWT6iFcPiV0SR8BIe2H_crNKrQjWG3MIWJGoPY&m=S28DdnzRGLiqN2fzuyeLtdjlmAJXoqU945F06brmY6c&s=pF3r4nauqGVl3XAPphS0LlwXAsMCZwObTE5n6r2MITk&e=">http://louisville.edu/micronano/</a></span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
<br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=cRmvgfWT6iFcPiV0SR8BIe2H_crNKrQjWG3MIWJGoPY&m=S28DdnzRGLiqN2fzuyeLtdjlmAJXoqU945F06brmY6c&s=fTporwugz8YLB_lRDIV8i3wIK6FCk8PZYcbOwXNwBY8&e=">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">--
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