<div dir="auto">Christophe,<div dir="auto"><br></div><div dir="auto">Does it have to be ebeam deposition?</div><div dir="auto"><br></div><div dir="auto">HfO2 is a pretty standard ALD process. Most ALD tools can do it at reasonable temperatures with good conformality, if you supply the right precursor.</div><div dir="auto"><br></div><div dir="auto">Sincerely,</div><div dir="auto"><br></div><div dir="auto">James Kerwin</div><div dir="auto">Rice University</div><div dir="auto">Cleanroom Support Technician</div><br><br><div class="gmail_quote" dir="auto"><div dir="ltr">On Fri, Nov 9, 2018, 8:58 PM Christophe Clément <<a href="mailto:christophe.clement@polymtl.ca">christophe.clement@polymtl.ca</a> wrote:<br></div><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div lang="FR-CA" link="#0563C1" vlink="#954F72"><div class="m_3678774984747073218WordSection1"><p class="MsoNormal"><span lang="EN-CA">Hello community, <u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA">I’ve been asked to deposit Hafnium Oxide in our Ebeam evaporator, and I do not have any experience with this material, is it safe to evaporate it regarding chamber/clean room contamination? <u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA">The tool we have does not have load lock and we evaporate mainly most metals and also metallic oxides. I’ve check KJL charts and HfO2 seems to be fair for Ebeam evaporation, if you can share your experience with this material that would be appreciated<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-CA">Many Thanks, <u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-CA">Christophe<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA"><u></u> <u></u></span></p><p class="MsoNormal"><b><i><span style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1f497d">Christophe Clément</span></i></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:gray">Technicien laboratoire</span></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Laboratoire de microfabrication (LMF)</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca" target="_blank" rel="noreferrer"><span style="color:#0563c1">www.gcmlab.ca</span></a></u></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Ecole Polytechnique de Montréal </span><span><a href="http://www.polymtl.ca/" target="_blank" rel="noreferrer"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">www.polymtl.ca</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Département de génie physique </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">*</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">2900 Boulevard Edouard Monpetit</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Pavillon JAB<br>Campus de l'Université de Montréal<br>Montréal (Québec) H3T 1J4</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray"><br></span><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">8</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><span><a href="mailto:christophe.clement@polymtl.ca" target="_blank" rel="noreferrer"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue">christophe.clement@polymtl.ca</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">(</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">514 340 4711<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Fax : 514 340 4711 # 2417 </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><u></u><u></u></span></p><p class="MsoNormal"><u></u> <u></u></p></div></div>_______________________________________________<br>
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