<META HTTP-EQUIV="Content-Type" CONTENT="text/html; charset=iso-8859-1">
<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta name=Generator content="Microsoft Word 15 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:"Segoe Script";
panose-1:3 11 5 4 2 0 0 0 0 3;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0cm;
mso-margin-bottom-alt:auto;
margin-left:0cm;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=FR-CA link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal><span lang=EN-CA style='color:#1F497D;mso-fareast-language:EN-US'>Hi Jim, we have the same tool here at Poly, we bought it from Axus Technology, they can offer support if you need.<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA style='color:#1F497D;mso-fareast-language:EN-US'><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-CA style='color:#1F497D;mso-fareast-language:EN-US'>You can contact Tim St Marie:<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:18.0pt;font-family:"Segoe Script";color:#1F497D'>Tim St. Marie</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Customer Support Manager</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Axus Technology</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'><a href="http://www.axustech.com/"><span style='color:blue'>WWW.axustech.com</span></a></span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>7001 W. Erie Street, Suite 1</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Chandler, AZ 85226</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Main Number: 480-705-8000</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Direct Line: 480-240-5548</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Cell Phone: 602-300-7901</span><span lang=EN-US style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'> <br></span><span lang=EN-US style='font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Office Fax: 480-705-8011 </span><b><i><span lang=EN-US style='font-size:10.0pt;color:red'><o:p></o:p></span></i></b></p><p class=MsoNormal><span lang=EN-US style='color:#1F497D;mso-fareast-language:EN-US'><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-CA style='color:#1F497D;mso-fareast-language:EN-US'>Regards, <o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA style='color:#1F497D;mso-fareast-language:EN-US'><o:p> </o:p></span></p><div><p class=MsoNormal><b><i><span style='font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D'>Christophe Clément</span></i></b><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Arial",sans-serif;color:gray'>Technicien laboratoire</span></b><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Laboratoire de microfabrication (LMF)</span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca">www.gcmlab.ca</a></u></span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Ecole Polytechnique de Montréal </span><span style='color:#1F497D'><a href="http://www.polymtl.ca/"><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>www.polymtl.ca</span></a></span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Département de génie physique </span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D'>*</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333'> </span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>2900 Boulevard Edouard Monpetit</span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Pavillon JAB<br>Campus de l'Université de Montréal<br>Montréal (Québec) H3T 1J4</span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'><br></span><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D'>8</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333'> </span><span style='color:#1F497D'><a href="mailto:christophe.clement@polymtl.ca"><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:blue'>christophe.clement@polymtl.ca</span></a></span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D'>(</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333'> </span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>514 340 4711<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>Fax : 514 340 4711 # 2417 </span><span style='font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D'><o:p></o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D;mso-fareast-language:EN-US'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0cm 0cm 0cm'><p class=MsoNormal><b><span lang=FR>De :</span></b><span lang=FR> Jim Fraser [mailto:jfraser96@byu.edu] <br><b>Envoyé :</b> 11 décembre 2018 10:58<br><b>À :</b> labnetwork@mtl.mit.edu<br><b>Objet :</b> [labnetwork] Equipment Support for Strasbaugh CMP?<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span lang=EN-US>Dear Colleagues,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>One of my researchers is trying to resurrect a Strasbaugh 6EC CMP system. He is having a problem with the wafer chuck not rotating. He said the company has been bought out and he can’t find anyone who supports the system. Does anyone have a contact that has been able to help with these older systems?<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>Thanks for your help,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>James R Fraser<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>IML Manager<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>460-L EB<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>Brigham Young University<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>801-422-4344<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p></div></body></html>