<div dir="ltr"><div dir="ltr"><div class="gmail_default" style="font-family:arial,helvetica,sans-serif">Mario,</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif">when we relamped our cleanroom about a year ago to go from T-12's to LED, we used this material for the lamps (Tarp50), and this material for the windows (Madico Amber 81).</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif">The interesting thing is that to do a good job on the UV, the filters are more orange, than yellow, however that could just be my opinion......</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif">So far, we've had no problems with either one.</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif"><br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div>Dennis<span class="gmail_default" style="font-family:arial,helvetica,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,helvetica,sans-serif">University of Michigan/LNF</span></div><div> </div><div>734.647.2055 Ofc</div><div> </div><div>On Thu, Dec 20, 2018 at 8:07 PM Beaudoin, Mario <<a href="mailto:beaudoin@physics.ubc.ca">beaudoin@physics.ubc.ca</a>> wrote:<br></div></div></div></div><div class="gmail_quote"><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p>Dear Labnetworks community,<br>
</p>
<p>I'm in the process of renovating our cleanroom and want yellow
filters that meet the specs of <i>Lithoprotect</i>, specifically,
I want way less than 1% transmission below 500nm. <i>Lithoprotect</i>
(see link below) claims less than 0.001% transmission below about
475nm. In our old cleanroom, we used to have traditional 1%
yellow windows that turned out to be inadequate for our maskless
lithography system.<br>
</p>
<p><a href="https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf" target="_blank">https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf</a></p>
<p>Does anyone know of a US supplier that offers similar product?
On the other hand, does anyone know of products that are not quite
as performing but still offer say 0.01% transmission below 500nm?
We will be using 405nm and 365nm light with a traditional mask
aligner and a maskless system. We typically use AZ 5214E-IR and
nLoF 2020 resists for down to 1um features; some users still use
Shipley 1813 and we have another set of groups using SU-8
resists. We're not committed to any supplier but do require tight
performance.<br>
</p>
<p>I'm cc'ing our cleanroom manufacturer engineers in this thread.</p>
<p>Regards,</p>
<p>Mario<br>
</p>
<div class="gmail-m_4757063991878823674moz-signature">-- <br>
<img src="cid:167d0da5580ec49b60d1" border="0"></div>
</div>
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