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<p>Hi Shane,</p>
<p>I run a small microfab with the systems that you listed and a few
analysis tools as well. Enough to do fabrication down to 1-2 um
litho features , but nothing super fancy. The lab is also used for
classes, I currently teach a microfabrication class on using the
tools to make a photovoltaic cell that is way over engineered. I
also have a faculty member using part of my facility running a lab
on multiple layer PCB fabrication. The courses are used to train
students, bring in some income, and get students aware of the
facility to chase that research direction. <br>
</p>
<p>We are currently in a research slump (people want sub-micron
fabrication - but the cost would be to great for my user base) so
recovering all costs just through use fees is not an option. We do
get some funds from the VPR that we need to compete for with other
shared facilities. I do external work for small companies and even
a university in Canada, but it is still not enough to cover the
bills - especially if something breaks. <br>
</p>
<p>What our use fees cover are a percentage of my salary (1/3), a
set supply list (basically anything the microfab class does not
use it is not consider essential so users need to buy those
supplies - there are a few supplies I keep that the class does not
use but we have enough turn over to make it worth it),
maintenance, repairs, and acquisition of new systems.</p>
<p>We have some issues with setting use fees to represent actual
costs per tool, as our accountants have set a $5000 min limit per
use fee - therefore I have to bundle similar systems to get their
use fee or bill only for supplies used. I am trying to resolve
this and several have tried for awhile at my Michigan Tech
University.</p>
<p>Send me any questions if you have them.<br>
</p>
<p>Regards,</p>
<p>Chito Kendrick<br>
</p>
<div class="moz-cite-prefix">On 1/30/2019 2:04 PM, Xin (Shane) Guo
wrote:<br>
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Hi Colleagues,</div>
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<br>
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We are building a microfabrication lab (small scale, standard
basic instruments such as ebeam, sputtering, RIE, PECVD,
lithography tools, etc). </div>
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<br>
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We are trying to understand how each facility recovers their
cost on supplies, labour, maintenance, etc. </div>
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<br>
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Is your annual user fee collected sufficient to cover all your
expenses including salary payment of the lab manager?</div>
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<br>
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Does your institution or department subsidise your facility?
What is your financial model?</div>
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<br>
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All suggestions are welcome, especially those from Canadian
institutions.</div>
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<br>
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Cheers</div>
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<br>
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Shane</div>
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<pre class="moz-quote-pre" wrap="">_______________________________________________
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<div class="moz-signature">-- <br>
Chito Kendrick Ph.D. <br>
<br>
<a href="https://sites.google.com/site/chitokendrickphd/">Chito
Kendrick Website</a><br>
<a href="http://www.mtu.edu/microfabrication/">MTU
Microfabrication Website</a><br>
<br>
Managing Director of the Microfabrication Facility<br>
Research Assistant Professor<br>
Electrical and Computer Engineering<br>
Michigan Technological University<br>
Room 436 M&M Building<br>
1400 Townsend Dr.<br>
Houghton, Michigan 49931-1295<br>
<br>
814-308-4255<br>
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