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<p>Would anyone like to describe their "self-made" magnetic traps?
I'm having trouble envisioning what these might look like. Thanks!</p>
<p>--Mike<br>
</p>
<div class="moz-cite-prefix">On 2/2/2019 6:08 PM, Albrecht, Wolfgang
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CFBE883FEDEF864B8BA0C486B0601A810123E9922F@ibn-Ex2010.ibn-net.kfa-juelich.de">
<pre class="moz-quote-pre" wrap="">Hi Bernd,
we assumed that secondary or stray electrons cause the effect. A measurement of the resist temperature during evaporation is complicated and we failed, but cooling the samples helps. There is a tendency that the effect increases with lowering the deposition rates. <b>With a self-made magnetic trap we were able to drastically reduce the blistering</b>. As it was a new device, we complained to Leybold and Ferrotec. Both were not aware of the effect. Ferrotec understood the problem and retrofitted the sources with magnetic traps. Since we had the same effect in another system (Balzers PLS 570) lowering the deposition rates, we also retrofitted the magnetic traps there.
Best Regards
Wolfgang
Wolfgang Albrecht
Director Helmholtz Nano Facility
Forschungszentrum Juelich
Leo-Brandt Straße
52425 Jülich
Tel.: + 49 2461 61 6364
Fax: +49 2461 61 96418
Email: <a class="moz-txt-link-abbreviated" href="mailto:w.albrecht@fz-juelich.de">w.albrecht@fz-juelich.de</a><a class="moz-txt-link-rfc2396E" href="mailto:w.albrecht@fz-juelich.de"><mailto:w.albrecht@fz-juelich.de></a>
<a class="moz-txt-link-freetext" href="http://www.hnf.fz-juelich.de">http://www.hnf.fz-juelich.de</a>
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Forschungszentrum Juelich GmbH
52425 Juelich
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Eingetragen im Handelsregister des Amtsgerichts Dueren Nr. HR B 3498
Vorsitzender des Aufsichtsrats: MinDir Dr. Karl Eugen Huthmacher
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</pre>
</blockquote>
<pre class="moz-signature" cols="72">--
Michael P. Young (574) 631-3268 (office)
Nanofabrication Specialist (574) 631-4393 (fax)
Department of Electrical Engineering (765) 637-3784 (cell)
University of Notre Dame <a class="moz-txt-link-abbreviated" href="mailto:mike.young@nd.edu">mike.young@nd.edu</a>
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637</pre>
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