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<p>KOH-based etchant perhaps?</p>
<p>--Mike<br>
</p>
<div class="moz-cite-prefix">On 2/2/2019 4:00 PM, McWilliams, Scott
wrote:<br>
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<p class="MsoNormal">Hello All,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am looking for a wet etch that will etch
sputtered silicon and not etch InP or InGaAs. I do not know
the exact composition of the InGaAs, but it is a zinc doped
contact layer for a laser diode. I did try some published
silicon etchants at various ratios (all at nominal room
temperature) of PAN etch, or acidic/nitride/HF, but they
etched the InGaAs a bit too fast.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I could not find online any information
about silicon to InGaAs selectivity, I would appreciate any
input if you have experience in this (I’m trying to avoid dry
etching this).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Scott McWilliams<o:p></o:p></p>
<p class="MsoNormal">Lab Manager<o:p></o:p></p>
<p class="MsoNormal">SMU<o:p></o:p></p>
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<pre class="moz-signature" cols="72">--
Michael P. Young (574) 631-3268 (office)
Nanofabrication Specialist (574) 631-4393 (fax)
Department of Electrical Engineering (765) 637-3784 (cell)
University of Notre Dame <a class="moz-txt-link-abbreviated" href="mailto:mike.young@nd.edu">mike.young@nd.edu</a>
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637</pre>
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