<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Aamer,<div class=""><br class=""></div><div class="">In MBE systems, thermal gas crackers are often used for low flux oxygen incorporation or other gases surface cleaning. Operating pressures are low and dissociation efficiency drops rather quickly with gas flow. Veeco, Scienta Omicron, Mantis and others have these as stock items. Helpful Google search term: "oxygen gas cracker mbe”.</div><div class=""><br class=""><div class="">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class=""><div style="orphans: auto; text-align: start; text-indent: 0px; widows: auto; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class=""><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;">Best,</div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;">Noah Clay</div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><br class=""></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">Noah Clay</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">School of Engineering & Applied Science</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">University of Pennsylvania</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">Philadelphia, PA</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><br class=""></div></div></div></div><div><blockquote type="cite" class=""><div class="">On Feb 7, 2019, at 9:57 PM, Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu" class="">mweiler@andrew.cmu.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class="">
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<span style="background-color: rgba(255, 255, 255, 0);" class="">Hi Aamar,</span>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><br class="">
</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class="">You could also try making a small 1/16” or 1/8” SS tube feed-through that allows a length of tube to enter the chamber and then bent into a position terminating nearby the substrate(s), thus permitting
the small amount of O2 you already/currently use to be discharged directly at the substrate. Inexpensive and worth a shot...</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><br class="">
</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class="">You would secure the swage fitting on the ATM side only after the correct length of tube within the chamber is determined. If you do not have a small swage feedthrough, you could use a 1/4” feed-through
(or 6mm) and then downsize with an adapter to 1/8 (3mm) nearby the substrate and have a small section of tube affixed there.</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><br class="">
</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class="">Best regards,</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><br class="">
</span></div>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class="">Mark</span></div>
<div class="">
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><br class="">
</span></div>
<div class=""><br class="">
</div>
</div>
<br class="">
<div dir="ltr" class=""><span style="background-color: rgba(255, 255, 255, 0);" class=""><b class="">Mark Weiler</b><br class="">
Equipment & Facilities Manager</span>
<div class=""><span style="background-color: rgba(255, 255, 255, 0);" class="">Claire and John Bertucci Nanotechnology Laboratory<br class="">
Electrical and Computer Engineering | Carnegie Mellon University<br class="">
<a href="x-apple-data-detectors://3/1" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="address" x-apple-data-detectors-result="3/1" style="-webkit-text-decoration-color: rgba(33, 33, 33, 0.258824);" class="">5000 Forbes Ave., Pittsburgh, PA 15213-3890</a><br class="">
T: <a href="tel:412.268.5430" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="3/2" style="-webkit-text-decoration-color: rgba(33, 33, 33, 0.258824);" class="">412.268.2471</a><br class="">
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<a href="http://www.ece.cmu.edu/" class="">www.ece.cmu.edu</a><br class="">
<a href="http://nanofab.ece.cmu.edu/" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="link" x-apple-data-detectors-result="4" class="">nanofab.ece.cmu.edu</a></span></div>
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<div dir="ltr" class=""><br class="">
On Feb 7, 2019, at 22:25, Dr. Aamer Mahmood <<a href="mailto:amahmood@hbku.edu.qa" class="">amahmood@hbku.edu.qa</a>> wrote:<br class="">
<br class="">
</div>
<blockquote type="cite" class="">
<div dir="ltr" class="">
<div style="direction: ltr; font-family: Tahoma; font-size: 10pt;" class="">Hello all,
<div class="">We have been doing reactive oxide depositions with e-beam evaporation of metals and a few sccm oxygen flowing through our system. We do not have a variable position gate valve and can only control the oxygen MFC settings. The corresponding chamber pressure
has been less than 2e-4 Torr. </div>
<div class="">I have recently received a request to deposit reactive metal oxide films at higher oxygen flow rates that'll correspond to higher chamber pressure during deposition.</div>
<div class="">I am hesitant to increase the deposition chamber pressure due to the increased flow rate because the manufacturer mentioned the aforementioned chamber pressure as an acceptable upper limit for the e-gun. </div>
<div class="">I'd appreciate any insights/experiences on this matter particularly 1) how does increased oxygen pressure in the chamber affect the system hardware, 2) any safety concerns etc.</div>
<div class="">Thanks in advance.</div>
<div class=""><br class="">
</div>
<div class="">-Aamer Mahmood</div>
<div class="">Qatar Environment and Energy Research Institute</div>
<div class="">Doha, Qatar</div>
</div>
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