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<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D">Bruce,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D">From my experience in the high tech industry none of the specialty gas tubing including Silane and DCS are evacuated when the tools are not in use. All lines remain charged for immediate processing
when needed. However, it is up to you and the universities policy whether to evacuate the lines or not.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D">Excess flow switches need to be integrated with the gas panel within the gas cabinet.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D">Orbitally welded SS316L EP single wall tubing is acceptable.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D">Regards<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> Wednesday, February 13, 2019 10:48 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Silane and Dichlorosilane Line Evacuation<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear users of Silane and Dichlorosilane,<o:p></o:p></p>
<p class="MsoNormal">When your systems that use silane and dichlorosilane are not in use do you evacuate the lines going to the tool? We are looking for the best practices for gas line safety in a student environment microelectronic clean room.
<o:p></o:p></p>
<p class="MsoNormal">The gas lines are wall mount or overhead coaxial stainless steel all welded lines with excess flow sensors.
<o:p></o:p></p>
<p class="MsoNormal">What are you doing with you silane and dichlorosilane lines?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:navy"><img width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D4C441.9F0043A0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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