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<p class="MsoNormal"><span style="color:#1F497D">Here at Draper the gas is left in the lines at all times, we use double wall stainless and the gas cabinet is tied to the toxic gas monitor. If there is a leak the bottle is automatically shut off. Our gas cabinets
are on the floor below the tools so there is a good distance to travel. If we pumped the lines out it would start to get expensive wasting all the gas. The purge of the lines must be done to ensure that there is no exposure to air so vacuum pump down is used
and that will take a long time to evacuate the lines, then on the flip side when you repressurize the lines you may run into issues.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">You should talk to your university safety group and check the local codes as every jurisdiction has different rules.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> Wednesday, February 13, 2019 1:48 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Silane and Dichlorosilane Line Evacuation<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear users of Silane and Dichlorosilane,<o:p></o:p></p>
<p class="MsoNormal">When your systems that use silane and dichlorosilane are not in use do you evacuate the lines going to the tool? We are looking for the best practices for gas line safety in a student environment microelectronic clean room.
<o:p></o:p></p>
<p class="MsoNormal">The gas lines are wall mount or overhead coaxial stainless steel all welded lines with excess flow sensors.
<o:p></o:p></p>
<p class="MsoNormal">What are you doing with you silane and dichlorosilane lines?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:navy"><img width="90" height="60" id="Picture_x0020_1" src="cid:image001.jpg@01D4C43B.550061F0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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