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Hi Long,
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<div>I have sputtered iron extensively using an ion beam (IBS) in a UHV chamber.  I did not notice any adverse affects… Our chamber was well shielded with custom fit stainless steel shields, which were cleaned every 3 to 4 months.</div>
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<div>Best,</div>
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<div>Mark<br>
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<div id="AppleMailSignature" dir="ltr"><span style="background-color: rgba(255, 255, 255, 0);"><b>Mark Weiler</b><br>
Equipment & Facilities Manager</span>
<div><span style="background-color: rgba(255, 255, 255, 0);">Claire and John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
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On Feb 21, 2019, at 22:17, Chang, Long <<a href="mailto:lvchang@central.uh.edu">lvchang@central.uh.edu</a>> wrote:<br>
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<div dir="ltr"><span>Hi All,</span><br>
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<span>I have a user who's wants to sputter Fe in our UHV sputtering system. My director is worried about rust forming. Anyone have adverse experience with Fe I should consider before allowing its usage?
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<span>Thanks,</span><br>
<span>Long</span><br>
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