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<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone know what the heat loads of those systems are (both idling and operating)?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Christian<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dr. Christian Pfluegl<o:p></o:p></p>
<p class="MsoNormal">Pendar Technologies LLC<o:p></o:p></p>
<p class="MsoNormal">tel.: (857) 413-9339<o:p></o:p></p>
<p class="MsoNormal">www.pendartechnologies.com<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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