<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=Windows-1252">
</head>
<body text="#000000" bgcolor="#FFFFFF">
<p>The installation requirements for our MA6 say, "max power requirement 2.5 kW (BA mode max 1 kW)".<br>
</p>
<div class="moz-cite-prefix">On 3/1/2019 9:01 AM, Christian Pfluegl wrote:<br>
</div>
<blockquote type="cite" cite="mid:SN6PR06MB52002E590EA9B7ACB6A573EAA3760@SN6PR06MB5200.namprd06.prod.outlook.com">
<meta name="Generator" content="Microsoft Word 15 (filtered
medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
<div class="WordSection1">
<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone know what the heat loads of those systems are (both idling and operating)?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Christian<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dr. Christian Pfluegl<o:p></o:p></p>
<p class="MsoNormal">Pendar Technologies LLC<o:p></o:p></p>
<p class="MsoNormal">tel.: (857) 413-9339<o:p></o:p></p>
<p class="MsoNormal"><a class="moz-txt-link-abbreviated" href="http://www.pendartechnologies.com">www.pendartechnologies.com</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<p style="font-size:8pt;color:gray">CONFIDENTIALITY NOTICE: This message contains confidential information and is intended only for the individual(s) addressed in the message. If you are not the named addressee, you should not disseminate, distribute, or copy
this e-mail. If you are not the intended recipient, you are notified that disclosing, distributing, or copying this e-mail is strictly prohibited.
</p>
<br>
<fieldset class="mimeAttachmentHeader"></fieldset>
<pre class="moz-quote-pre" wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
</blockquote>
<pre class="moz-signature" cols="72">--
Quinn Leonard
Technical Staff
Nanoscale Fabrication Center
University of Wisconsin
Room 3112 Engineering Centers Building
1550 Engineering Drive
Madison, WI 53706
(608) 890-3030
<a class="moz-txt-link-abbreviated" href="mailto:qleonard@wisc.edu">qleonard@wisc.edu</a>
<a class="moz-txt-link-freetext" href="https://wcnt.wisc.edu/">https://wcnt.wisc.edu/</a></pre>
</body>
</html>